caa a22 4500 463213246 CHVBK 20200831144647.0 cr unu---uuuuu 170326e20071201xx s 000 0 eng 10.1007/s00339-007-4288-y doi (NATIONALLICENCE)springer-10.1007/s00339-007-4288-y One-step preparation of N-doped strontium titanate films by pulsed laser deposition [Elektronische Daten] [I. Marozau, M. Döbeli, T. Lippert, D. Logvinovich, M. Mallepell, A. Shkabko, A. Weidenkaff, A. Wokaun] Perovskite-type oxynitrides exhibit promising electrical and optical properties and can possibly be used in the future as functional materials for electrical, photo-, and electrochemical applications. Continuous heterovalent substitution of oxygen ions by nitrogen ions allows tuning of the desired optical and/or electronic properties to the application specifications. In the present work deposition of SrTiO3:N films by pulsed reactive crossed beam laser ablation was studied in order to examine the influence of different deposition parameters on the film crystallinity and composition. The deposited films exhibit a perovskite-type crystal structure and reveals epitaxial growth on MgO(100) substrates. The unit cell parameters of the deposited SrTiO3:N films range within $3.9\underline{11}<a<3.9\underline{19}$ , which is slightly larger than for polycrystalline SrTiO3 (a=3.905). The studied films reveal an oxygen content in the range of (2.70-2.98)±0.15. The relative N content (vs. O) can be tuned within the range of 1.0-3.0% by adjusting the deposition parameters. The N:O concentration ratio increases with increasing laser fluence and target-to-substrate distances, while the substrate temperature has a more complex influence on the nitrogen concentration. In the range of 580-650°C the [N]/[O] ratio increases while further heating results in a gradual decrease of the N content. Springer-Verlag, 2007 Marozau I. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland aut Döbeli M. Ion Beam Physics, Paul Scherrer Institut and ETH Zurich, 8093, Zurich, Switzerland aut Lippert T. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland aut Logvinovich D. Empa, Überlandstrasse 129, 8600, Dübendorf, Switzerland aut Mallepell M. Ion Beam Physics, Paul Scherrer Institut and ETH Zurich, 8093, Zurich, Switzerland aut Shkabko A. Empa, Überlandstrasse 129, 8600, Dübendorf, Switzerland aut Weidenkaff A. Empa, Überlandstrasse 129, 8600, Dübendorf, Switzerland aut Wokaun A. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland aut Applied Physics A Springer-Verlag 89/4(2007-12-01), 933-940 0947-8396 89:4<933 2007 89 339 https://doi.org/10.1007/s00339-007-4288-y text/html Onlinezugriff via DOI BK010053 XK010053 XK010000 Metadata rights reserved Springer special CC-BY-NC licence nationallicence 1 research-article jats NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4288-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Marozau I. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland aut NATIONALLICENCE 700 1- Döbeli M. Ion Beam Physics, Paul Scherrer Institut and ETH Zurich, 8093, Zurich, Switzerland aut NATIONALLICENCE 700 1- Lippert T. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland aut NATIONALLICENCE 700 1- Logvinovich D. Empa, Überlandstrasse 129, 8600, Dübendorf, Switzerland aut NATIONALLICENCE 700 1- Mallepell M. Ion Beam Physics, Paul Scherrer Institut and ETH Zurich, 8093, Zurich, Switzerland aut NATIONALLICENCE 700 1- Shkabko A. Empa, Überlandstrasse 129, 8600, Dübendorf, Switzerland aut NATIONALLICENCE 700 1- Weidenkaff A. Empa, Überlandstrasse 129, 8600, Dübendorf, Switzerland aut NATIONALLICENCE 700 1- Wokaun A. Paul Scherrer Institut, 5232, Villigen PSI, Switzerland aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/4(2007-12-01), 933-940 0947-8396 89:4<933 2007 89 339 SWISSBIB 463213246