caa a22 4500 463213300 CHVBK 20180405153148.0 cr unu---uuuuu 170326e20071101xx s 000 0 eng 10.1007/s00339-007-4135-1 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4135-1 Surface profile measurement using laser-scanning angle deviation microscopy [Elektronische Daten] [C.-W. Lai, M.-H. Chiu] Laser-scanning angular deviation microscopy based on the small angle measurement using surface plasmon resonance (SPR) phase detection technique is proposed. The phase shift coming from a SPR sensor is measured by a common-path heterodyne interferometry. This phase deviation is proportional to the beam converging or diverging angle, due to the specimen departing from the focal plane of objective lens. Using the phase deviations, one can calculate the surface profile by use of numerical method. The specimen could be scanned in real-time and the axial-resolution could be better than 1nm. Springer-Verlag, 2007 Lai C.-W Department of Electro-Optical Engineering, National Formosa University, No 64 Wunhua Road, 632, Huwei Yunlin, Taiwan, R.O.C. aut Chiu M.-H Department of Electro-Optical Engineering, National Formosa University, No 64 Wunhua Road, 632, Huwei Yunlin, Taiwan, R.O.C. aut Applied Physics A Springer-Verlag 89/2(2007-11-01), 403-406 0947-8396 89:2<403 2007 89 339 https://doi.org/10.1007/s00339-007-4135-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4135-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Lai C.-W Department of Electro-Optical Engineering, National Formosa University, No 64 Wunhua Road, 632, Huwei Yunlin, Taiwan, R.O.C aut NATIONALLICENCE 700 1- Chiu M.-H Department of Electro-Optical Engineering, National Formosa University, No 64 Wunhua Road, 632, Huwei Yunlin, Taiwan, R.O.C aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/2(2007-11-01), 403-406 0947-8396 89:2<403 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer