caa a22 4500 463213459 CHVBK 20180405153148.0 cr unu---uuuuu 170326e20071101xx s 000 0 eng 10.1007/s00339-007-4166-7 doi (NATIONALLICENCE)springer-10.1007/s00339-007-4166-7 Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres [Elektronische Daten] [D. Eversole, B. Luk'yanchuk, A. Ben-Yakar] We present the fabrication of nanostructures ablated on silicon(100) by the plasmonic scattering of 780nm, 220fs laser pulses in the near-field of gold nanospheres. We take advantage of the enhanced plasmonic scattering of ultrashort laser light in the particle near-field to ablate well-defined nanocraters. Gold nanospheres of 150nm diameter are deposited onto a silicon surface and irradiated with a single laser pulse. We studied the effect of laser polarization on the morphology of ablated nanostructures and estimated the minimum fluence for plasmonic nanoablation. When the polarization of the incident radiation is directed at a 45° angle into the substrate surface, a near-field enhancement of 23.1±7.6 is measured, reducing the required silicon ablation fluence from 191±14mJ/cm2 to 8.2±2.9mJ/cm2. Enhancements are also measured for laser polarizations parallel to the substrate surface when the substrate is angled 0° and 45° to the incident irradiation, giving enhancements of 6.9±0.6 and 4.1±1.3, respectively. Generated nanocrater morphologies show a direct imprint of the particle dipolar scattering region, as predicted in our theoretical calculations. The measured near-field enhancement values agree well with the maximum field enhancements obtained in our calculations. The agreement between theory and measurements supports that the nanocraters are indeed formed by the enhanced plasmonic scattering in the near-field of the nanoparticles. Springer-Verlag, 2007 Eversole D. Department of Biomedical Engineering, University of Texas at Austin, 78722, Austin, TX, USA aut Luk'yanchuk B. Agency for Science, Technology and Research, Data Storage Institute, 117608, Singapore, Singapore aut Ben-Yakar A. Department of Biomedical Engineering, University of Texas at Austin, 78722, Austin, TX, USA aut Applied Physics A Springer-Verlag 89/2(2007-11-01), 283-291 0947-8396 89:2<283 2007 89 339 https://doi.org/10.1007/s00339-007-4166-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-4166-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Eversole D. Department of Biomedical Engineering, University of Texas at Austin, 78722, Austin, TX, USA aut NATIONALLICENCE 700 1- Luk'yanchuk B. Agency for Science, Technology and Research, Data Storage Institute, 117608, Singapore, Singapore aut NATIONALLICENCE 700 1- Ben-Yakar A. Department of Biomedical Engineering, University of Texas at Austin, 78722, Austin, TX, USA aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 89/2(2007-11-01), 283-291 0947-8396 89:2<283 2007 89 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer