caa a22 4500 463214080 CHVBK 20180405153150.0 cr unu---uuuuu 170326e20070101xx s 000 0 eng 10.1007/s00339-006-3743-5 doi (NATIONALLICENCE)springer-10.1007/s00339-006-3743-5 Deep drilling on a silicon plate with a femtosecond laser: experiment and model analysis [Elektronische Daten] [T. Matsumura, T. Nakatani, T. Yagi] The ablation rate when drilling fine holes having large aspect ratios in silicon substrates with femtosecond laser pulses was estimated from mechanically ground cross sections of the ablated holes. The ablation rate shows a dramatic change at the depth at which the laser pulse reaches a certain fluence, which is nearly constant when the initial laser fluence was varied from 14.5 to 59.4J/cm2. The ablation rate, threshold fluence, in three fluence domains, and the transition fluences at which the ablation rate shows a dramatic change, were derived. However, when a pulse energy of 200μJ was used a much greater ablation rate was obtained, suggesting that another fluence domain for larger ablation rates exists. The experimentally obtained hole depths as a function of shot numbers were reproduced by a theoretical model, which incorporates laser pulse attenuation in the holes that is the same as that in waveguides for some attenuation coefficient and ablation rates for three fluence domains. Springer-Verlag, 2006 Matsumura T. Suruga Seiki Corp, 549-1 Nanatushinya, Shimizu, Shizuoka, Japan aut Nakatani T. Physics Department, Tokai University, 1117 Kita-kaname, Hiratsuka, Kanagawa, Japan aut Yagi T. Physics Department, Tokai University, 1117 Kita-kaname, Hiratsuka, Kanagawa, Japan aut Applied Physics A Springer-Verlag 86/1(2007-01-01), 107-114 0947-8396 86:1<107 2007 86 339 https://doi.org/10.1007/s00339-006-3743-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-006-3743-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Matsumura T. Suruga Seiki Corp, 549-1 Nanatushinya, Shimizu, Shizuoka, Japan aut NATIONALLICENCE 700 1- Nakatani T. Physics Department, Tokai University, 1117 Kita-kaname, Hiratsuka, Kanagawa, Japan aut NATIONALLICENCE 700 1- Yagi T. Physics Department, Tokai University, 1117 Kita-kaname, Hiratsuka, Kanagawa, Japan aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 86/1(2007-01-01), 107-114 0947-8396 86:1<107 2007 86 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer