caa a22 4500 463214846 CHVBK 20180405153153.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s00339-006-3846-z doi (NATIONALLICENCE)springer-10.1007/s00339-006-3846-z Direct removal of SU-8 using focused laser writing [Elektronische Daten] [F.C. Cheong, B. Varghese, S. Sindhu, C.M. Liu, S. Valiyaveettil, A.A. Bettiol, J.A. van Kan, F. Watt, W.S. Chin, C.T. Lim, C.H. Sow] SU-8 photoresist is an important material used in the development of micro-devices [1]. Cross-linked SU-8 structures have been known for their thermal stability and their strong resistance to standard solvent, acid and base. Due to the inert properties of this polymer, it is difficult to further modify or remove SU-8 once it is completely cured. We report an effective process to pattern cured SU-8 photoresist on glass using focused laser beam. Laser fabrication has been an important tool in various fields of research [2]. We made use of this laser cutting method to create interesting and useful two-dimensional SU-8 structures. The shapes and sizes of the structures created can be controlled by varying the power of the laser, angle of incident of the focused laser beam, the relative speed with which the laser beam traverse through the SU-8 film and the magnification of objective lens used. Besides two-dimensional structures, we can also create three-dimensional structures. In this case, we made use of a combination of controlled depth cutting and undercutting where focused laser beam is transmitted through the transparent substrate. Some possible applications of the laser patterned SU-8 film are also demonstrated in this work. Springer-Verlag, 2007 Cheong F.C. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut Varghese B. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut Sindhu S. Nanoscience and Nanotechnology Initiative, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut Liu C.M. Department of Chemistry, National University of Singapore, 3 Science Drive 3, 117543, Singapore, Singapore aut Valiyaveettil S. Department of Chemistry, National University of Singapore, 3 Science Drive 3, 117543, Singapore, Singapore aut Bettiol A.A. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut van Kan J.A. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut Watt F. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut Chin W.S. Department of Chemistry, National University of Singapore, 3 Science Drive 3, 117543, Singapore, Singapore aut Lim C.T. Division of Bioengineering and Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, 117576, Singapore, Singapore aut Sow C.H. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut Applied Physics A Springer-Verlag 87/1(2007-04-01), 71-76 0947-8396 87:1<71 2007 87 339 https://doi.org/10.1007/s00339-006-3846-z text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-006-3846-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Cheong F.C. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 700 1- Varghese B. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 700 1- Sindhu S. Nanoscience and Nanotechnology Initiative, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 700 1- Liu C.M. Department of Chemistry, National University of Singapore, 3 Science Drive 3, 117543, Singapore, Singapore aut NATIONALLICENCE 700 1- Valiyaveettil S. Department of Chemistry, National University of Singapore, 3 Science Drive 3, 117543, Singapore, Singapore aut NATIONALLICENCE 700 1- Bettiol A.A. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 700 1- van Kan J.A. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 700 1- Watt F. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 700 1- Chin W.S. Department of Chemistry, National University of Singapore, 3 Science Drive 3, 117543, Singapore, Singapore aut NATIONALLICENCE 700 1- Lim C.T. Division of Bioengineering and Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, 117576, Singapore, Singapore aut NATIONALLICENCE 700 1- Sow C.H. Department of Physics, Blk S12, Faculty of Science, National University of Singapore, 2 Science Drive 3, 117542, Singapore, Singapore aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/1(2007-04-01), 71-76 0947-8396 87:1<71 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer