caa a22 4500 463214919 CHVBK 20180405153153.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s00339-006-3847-y doi (NATIONALLICENCE)springer-10.1007/s00339-006-3847-y Processing of transparent materials using visible nanosecond laser pulses [Elektronische Daten] [B. Hopp, T. Smausz, M. Bereznai] Laser micromachining of transparent materials is an intensively studied research area from the point of view of microoptical element fabrication. One of the most promising indirect processing methods is the laser-induced back-side dry etching (LIBDE). During this method, transparent targets are contacted with solid thin layers, which absorb and transform the pulse energy resulting in etching. The applicability of LIBDE technology for processing of fused silica using a visible nanosecond dye laser (λ=500nm, FWHM=11ns) and a 100-nm-thick aluminium absorbing layer was investigated. The applied fluence was varied in the range of 0-3050mJ/cm2; the illuminated area was 0.1mm2. The threshold fluence of the LIBDE etching of fused silica was found to be approximately 540mJ/cm2. The chemical composition of the surface layers on and around the etched holes was investigated by field-emission scanning electron microscopy and energy-dispersive X-ray spectrometry. It was found that on average 0.4±0.3at. % aluminium is built into the upper ∼1-μm-thick volume of the illuminated fused silica, while the aluminium content fell below the detection limit in the case of the original surface. Our experiments proved that the LIBDE procedure is suitable for microprocessing of transparent materials using visible nanosecond laser light. Springer-Verlag, 2007 Hopp B. Research Group on Laser Physics, Hungarian Academy of Sciences and University of Szeged, Dóm tér 9, 6720, Szeged, Hungary aut Smausz T. Department of Optics and Quantum Electronics, University of Szeged, Dóm tér 9, 6720, Szeged, Hungary aut Bereznai M. Department of Optics and Quantum Electronics, University of Szeged, Dóm tér 9, 6720, Szeged, Hungary aut Applied Physics A Springer-Verlag 87/1(2007-04-01), 77-79 0947-8396 87:1<77 2007 87 339 https://doi.org/10.1007/s00339-006-3847-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-006-3847-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Hopp B. Research Group on Laser Physics, Hungarian Academy of Sciences and University of Szeged, Dóm tér 9, 6720, Szeged, Hungary aut NATIONALLICENCE 700 1- Smausz T. Department of Optics and Quantum Electronics, University of Szeged, Dóm tér 9, 6720, Szeged, Hungary aut NATIONALLICENCE 700 1- Bereznai M. Department of Optics and Quantum Electronics, University of Szeged, Dóm tér 9, 6720, Szeged, Hungary aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/1(2007-04-01), 77-79 0947-8396 87:1<77 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer