caa a22 4500 463215001 CHVBK 20180405153153.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s00339-006-3843-2 doi (NATIONALLICENCE)springer-10.1007/s00339-006-3843-2 Glass processing using the fourth harmonic of nanosecond pulse Nd:YAG laser [Elektronische Daten] [Y. Matsuoka, K. Wake, T. Nagashima, N. Iehisa] Ablation processing of borosilicate glass was carried out using the fourth harmonic of the Q-switch Nd:YAG laser. The dependency of the ablation depth on irradiation pulse energy density and the dependency of the ablation depth on irradiation spot size were investigated. The average ablation depth increased with an increase in irradiation pulse energy density. When the irradiation pulse energy density was the same, the ablation depth of the focused beam with a large spot diameter was deeper than that of the focused beam with a small spot diameter. To shorten the processing time, an increase in the irradiation pulse energy density and use of a large spot size focused beam are effective. Using area scanning together with line scanning, a rectangular through hole (sub-mm size) without cracks or chips was formed in borosilicate glass of 140μm in thickness. Springer-Verlag, 2007 Matsuoka Y. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba East, Namiki 1-2-1, Tsukuba, 305-8564, Ibaraki, Japan aut Wake K. MIYACHI Corp., Ueno NS Bldg., 7F, 3-18-10 Motoasakusa Taitou-ku, 111-0041, Tokyo, Japan aut Nagashima T. MIYACHI Corp., Ueno NS Bldg., 7F, 3-18-10 Motoasakusa Taitou-ku, 111-0041, Tokyo, Japan aut Iehisa N. MIYACHI Corp., Ueno NS Bldg., 7F, 3-18-10 Motoasakusa Taitou-ku, 111-0041, Tokyo, Japan aut Applied Physics A Springer-Verlag 87/1(2007-04-01), 81-85 0947-8396 87:1<81 2007 87 339 https://doi.org/10.1007/s00339-006-3843-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-006-3843-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Matsuoka Y. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba East, Namiki 1-2-1, Tsukuba, 305-8564, Ibaraki, Japan aut NATIONALLICENCE 700 1- Wake K. MIYACHI Corp., Ueno NS Bldg., 7F, 3-18-10 Motoasakusa Taitou-ku, 111-0041, Tokyo, Japan aut NATIONALLICENCE 700 1- Nagashima T. MIYACHI Corp., Ueno NS Bldg., 7F, 3-18-10 Motoasakusa Taitou-ku, 111-0041, Tokyo, Japan aut NATIONALLICENCE 700 1- Iehisa N. MIYACHI Corp., Ueno NS Bldg., 7F, 3-18-10 Motoasakusa Taitou-ku, 111-0041, Tokyo, Japan aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/1(2007-04-01), 81-85 0947-8396 87:1<81 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer