caa a22 4500 46321501X CHVBK 20180405153153.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s00339-007-3864-5 doi (NATIONALLICENCE)springer-10.1007/s00339-007-3864-5 Investigation of the sorption properties of thin Ge-S-AgI films deposited on cantilever-based gas sensor [Elektronische Daten] [B. Monchev, D. Filenko, N. Nikolov, C. Popov, T. Ivanov, P. Petkov, I.W. Rangelow] Thin amorphous Ge-S-AgI films were thermally evaporated on cantilever sensors and their sorption properties were investigated upon exposure to volatile analytes, such as water, ethanol, acetone, and ammonia vapours. The films were smooth and uniform in thickness as revealed by atomic force and scanning electron microscopies. The exposure to the analytes resulted in a change of the resonance frequency of the cantilever. Initially, the largest dynamic responses (frequency shifts) were observed towards acetone, i.e. the cantilever acted as a resonant microbalance. When the sensor was exposed to ammonia, its molecules were chemisorbed on the surface of the sensitive layer. This surface modification increased the sensor sensitivity towards water molecules by the creation of new interaction sites. Springer-Verlag, 2007 Monchev B. Department of Physics, Laboratory of Thin Film Technology, University of Chemical Technology and Metallurgy, 8 Kl. Ohridski Blvd., 1756, Sofia, Bulgaria aut Filenko D. Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett Str. 40, 34132, Kassel, Germany aut Nikolov N. Microsystems Ltd., General Kolev Str. 92, 9010, Varna, Bulgaria aut Popov C. Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett Str. 40, 34132, Kassel, Germany aut Ivanov T. Institute of Micro- and Nanoelectronics, Technical University of Ilmenau, PO Box 100565, 98684, Ilmenau, Germany aut Petkov P. Department of Physics, Laboratory of Thin Film Technology, University of Chemical Technology and Metallurgy, 8 Kl. Ohridski Blvd., 1756, Sofia, Bulgaria aut Rangelow I.W. Institute of Micro- and Nanoelectronics, Technical University of Ilmenau, PO Box 100565, 98684, Ilmenau, Germany aut Applied Physics A Springer-Verlag 87/1(2007-04-01), 31-36 0947-8396 87:1<31 2007 87 339 https://doi.org/10.1007/s00339-007-3864-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-3864-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Monchev B. Department of Physics, Laboratory of Thin Film Technology, University of Chemical Technology and Metallurgy, 8 Kl. Ohridski Blvd., 1756, Sofia, Bulgaria aut NATIONALLICENCE 700 1- Filenko D. Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett Str. 40, 34132, Kassel, Germany aut NATIONALLICENCE 700 1- Nikolov N. Microsystems Ltd., General Kolev Str. 92, 9010, Varna, Bulgaria aut NATIONALLICENCE 700 1- Popov C. Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett Str. 40, 34132, Kassel, Germany aut NATIONALLICENCE 700 1- Ivanov T. Institute of Micro- and Nanoelectronics, Technical University of Ilmenau, PO Box 100565, 98684, Ilmenau, Germany aut NATIONALLICENCE 700 1- Petkov P. Department of Physics, Laboratory of Thin Film Technology, University of Chemical Technology and Metallurgy, 8 Kl. Ohridski Blvd., 1756, Sofia, Bulgaria aut NATIONALLICENCE 700 1- Rangelow I.W. Institute of Micro- and Nanoelectronics, Technical University of Ilmenau, PO Box 100565, 98684, Ilmenau, Germany aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/1(2007-04-01), 31-36 0947-8396 87:1<31 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer