caa a22 4500 463215273 CHVBK 20180405153154.0 cr unu---uuuuu 170326e20070601xx s 000 0 eng 10.1007/s00339-007-3933-9 doi (NATIONALLICENCE)springer-10.1007/s00339-007-3933-9 New approaches for growth control of GaN-based HEMT structures [Elektronische Daten] [H. Hardtdegen, R. Steins, N. Kaluza, Y.S. Cho, K. Wirtz, M. von der Ahe, H.L. Bay, G. Heidelberger, M. Marso] This paper reports on new approaches for growth control of GaN-based heterostructures for high frequency and high power application. First in situ methods are presented and their further development discussed [1]. The development leads to a greatly improved observation of growth parameter influences in the MOVPE of GaN. A new growth process is introduced which enhances growth reproducibility [2]. This new growth process is then optimized with respect to the envisaged application. To this end process modeling will be employed. The application envisaged is the AlxGa1-xN/GaN high electron mobility transistor (HEMT). At last device results will be presented. All in all it will be shown how fundamental research can drive technology and how basic knowledge can be employed for process development with respect to device applications. Springer-Verlag, 2007 Hardtdegen H. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Steins R. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Kaluza N. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Cho Y.S. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Wirtz K. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut von der Ahe M. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Bay H.L. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Heidelberger G. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Marso M. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut Applied Physics A Springer-Verlag 87/3(2007-06-01), 491-498 0947-8396 87:3<491 2007 87 339 https://doi.org/10.1007/s00339-007-3933-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-3933-9 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Hardtdegen H. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Steins R. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Kaluza N. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Cho Y.S. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Wirtz K. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- von der Ahe M. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Bay H.L. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Heidelberger G. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 700 1- Marso M. Center of Nanoelectronic Systems for Information Technology (CNI), Institute of Bio- and Nanosystems, Research Center Jülich, 52425, Jülich, Germany aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/3(2007-06-01), 491-498 0947-8396 87:3<491 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer