caa a22 4500 463215486 CHVBK 20180405153155.0 cr unu---uuuuu 170326e20070601xx s 000 0 eng 10.1007/s00339-007-3893-0 doi (NATIONALLICENCE)springer-10.1007/s00339-007-3893-0 Large-area growth of vertically aligned ZnO pillars by radio-frequency magnetron sputtering [Elektronische Daten] [J.H. Huang, C.Y. Wang, C.P. Liu, W.H. Chu, Y.J. Chang] A new method for fabricating large-area well-aligned ZnO pillars, solely using radio-frequency magnetron sputtering, is reported. A mixture of argon and hydrogen gases was used as the plasma source, acting as a reduction agent. The ZnO pillars grow from a ZnO buffer layer with a ZnMgO nucleation stabilization layer on top, with the sputtered targets sharing the same composition. The entire growth is well controlled and linear. A shadowing effect is also responsible for the growth. The characteristics of the developed method are high uniformity and reproducibility, as commonly known for sputtering, which are vital prerequisites for future developments of nanodevices. Springer-Verlag, 2007 Huang J.H. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut Wang C.Y. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut Liu C.P. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut Chu W.H. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut Chang Y.J. Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan aut Applied Physics A Springer-Verlag 87/4(2007-06-01), 749-753 0947-8396 87:4<749 2007 87 339 https://doi.org/10.1007/s00339-007-3893-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-3893-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Huang J.H. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut NATIONALLICENCE 700 1- Wang C.Y. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut NATIONALLICENCE 700 1- Liu C.P. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut NATIONALLICENCE 700 1- Chu W.H. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan aut NATIONALLICENCE 700 1- Chang Y.J. Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/4(2007-06-01), 749-753 0947-8396 87:4<749 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer