caa a22 4500 46321563X CHVBK 20180405153155.0 cr unu---uuuuu 170326e20070601xx s 000 0 eng 10.1007/s00339-007-3881-4 doi (NATIONALLICENCE)springer-10.1007/s00339-007-3881-4 Replica molding of picosecond laser fabricated Si microstructures [Elektronische Daten] [C. Reinhardt, S. Passinger, V. Zorba, B.N. Chichkov, C. Fotakis] This work demonstrates the fast generation and rapid replication of laser-fabricated three-dimensional conical microstructures on single-crystalline silicon. Large areas containing Si structures are fabricated by fast scanning of the focussed laser beam of a high-power, high repetition rate infrared picosecond laser system over the Si surface, in the presence of SF6. Furthermore, the possibility of replicating the initial spiked morphology on other materials is demonstrated by polydimethylsiloxane molding in vacuum. Results showing the successful transfer of the initial conical morphology on the photocurable resist material ORMOCER (an organically modified ceramic) are presented. The combination of laser-based methods and standard replication technology may open up interesting prospects for the fast and efficient transfer of three-dimensional patterns over a wide range of materials. Springer-Verlag, 2007 Reinhardt C. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany aut Passinger S. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany aut Zorba V. Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology Hellas (FORTH), Vassilika Vouton, P.O. Box 1527, 71110, Heraklion, Greece aut Chichkov B.N. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany aut Fotakis C. Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology Hellas (FORTH), Vassilika Vouton, P.O. Box 1527, 71110, Heraklion, Greece aut Applied Physics A Springer-Verlag 87/4(2007-06-01), 673-677 0947-8396 87:4<673 2007 87 339 https://doi.org/10.1007/s00339-007-3881-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-3881-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Reinhardt C. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany aut NATIONALLICENCE 700 1- Passinger S. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany aut NATIONALLICENCE 700 1- Zorba V. Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology Hellas (FORTH), Vassilika Vouton, P.O. Box 1527, 71110, Heraklion, Greece aut NATIONALLICENCE 700 1- Chichkov B.N. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany aut NATIONALLICENCE 700 1- Fotakis C. Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology Hellas (FORTH), Vassilika Vouton, P.O. Box 1527, 71110, Heraklion, Greece aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/4(2007-06-01), 673-677 0947-8396 87:4<673 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer