caa a22 4500 463215761 CHVBK 20180405153155.0 cr unu---uuuuu 170326e20070601xx s 000 0 eng 10.1007/s00339-007-3898-8 doi (NATIONALLICENCE)springer-10.1007/s00339-007-3898-8 Structural and tribological properties of cluster-assembled CNx films [Elektronische Daten] [M. Blomqvist, G. Bongiorno, A. Podestà, V. Serin, G. Abrasonis, U. Kreissig, W. Möller, E. Coronel, S. Wachtmeister, S. Csillag, V. Cassina, P. Piseri, P. Milani] We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system. Springer-Verlag, 2007 Blomqvist M. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut Bongiorno G. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut Podestà A. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut Serin V. CEMES-CNRS, 29 rue J. Marvig, 94347, 31055, Toulouse Cedex, France aut Abrasonis G. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany aut Kreissig U. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany aut Möller W. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany aut Coronel E. The Tribomaterials Group at Ångström Laboratory, Uppsala University, Box 534, 75121, Uppsala, Sweden aut Wachtmeister S. Department of Physics, Stockholm University, SCFAB, 10691, Stockholm, Sweden aut Csillag S. Department of Physics, Stockholm University, SCFAB, 10691, Stockholm, Sweden aut Cassina V. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut Piseri P. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut Milani P. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut Applied Physics A Springer-Verlag 87/4(2007-06-01), 767-772 0947-8396 87:4<767 2007 87 339 https://doi.org/10.1007/s00339-007-3898-8 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-007-3898-8 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Blomqvist M. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut NATIONALLICENCE 700 1- Bongiorno G. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut NATIONALLICENCE 700 1- Podestà A. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut NATIONALLICENCE 700 1- Serin V. CEMES-CNRS, 29 rue J. Marvig, 94347, 31055, Toulouse Cedex, France aut NATIONALLICENCE 700 1- Abrasonis G. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany aut NATIONALLICENCE 700 1- Kreissig U. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany aut NATIONALLICENCE 700 1- Möller W. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PF-510119, 01314, Dresden, Germany aut NATIONALLICENCE 700 1- Coronel E. The Tribomaterials Group at Ångström Laboratory, Uppsala University, Box 534, 75121, Uppsala, Sweden aut NATIONALLICENCE 700 1- Wachtmeister S. Department of Physics, Stockholm University, SCFAB, 10691, Stockholm, Sweden aut NATIONALLICENCE 700 1- Csillag S. Department of Physics, Stockholm University, SCFAB, 10691, Stockholm, Sweden aut NATIONALLICENCE 700 1- Cassina V. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut NATIONALLICENCE 700 1- Piseri P. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut NATIONALLICENCE 700 1- Milani P. Dipartimento di Fisica and CIMAINA, Università di Milano, Via Celoria 16, 20133, Milano, Italy aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/4(2007-06-01), 767-772 0947-8396 87:4<767 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer