caa a22 4500 463215893 CHVBK 20180405153156.0 cr unu---uuuuu 170326e20070501xx s 000 0 eng 10.1007/s00339-006-3836-1 doi (NATIONALLICENCE)springer-10.1007/s00339-006-3836-1 Ultra-smooth metal surfaces generated by pressure-induced surface deformation of thin metal films [Elektronische Daten] [V.J. Logeeswaran, M.-L. Chan, Y. Bayam, M. Saif Islam, D.A. Horsley, X. Li, W. Wu, S.Y. Wang, R.S. Williams] We present a mechanical pressing technique for generating ultra-smooth surfaces on thin metal films by flattening the bumps, asperities, rough grains and spikes of a freshly vacuum deposited metal film. The method was implemented by varying the applied pressure from 100MPa to 600MPa on an e-beam evaporated silver film of thickness 1000Å deposited on double-polished (100)-oriented silicon surfaces, resulting in a varying degree of film smoothness. The surface morphology of the thin film was studied using atomic force microscopy. Notably, at a pressure of ∼600MPa an initial silver surface with 13-nm RMS roughness was plastically deformed and transformed to an ultra-flat plane with better than 0.1nm RMS. Our demonstration with the e-beam evaporated silver thin film exhibits the potential for applications in decreasing the scattering-induced losses in optical metamaterials, plasmonic nanodevices and electrical shorts in molecular-scale electronic devices. Springer-Verlag, 2007 Logeeswaran V.J. Integrated Nanodevices and System Research, Department of Electrical and Computer Engineering, University of California, 3139 Kemper Hall, 95616, Davis, CA, USA aut Chan M.-L Mechanical and Aeronautical Engineering Department, University of California, 95616, Davis, CA, USA aut Bayam Y. Integrated Nanodevices and System Research, Department of Electrical and Computer Engineering, University of California, 3139 Kemper Hall, 95616, Davis, CA, USA aut Saif Islam M. Integrated Nanodevices and System Research, Department of Electrical and Computer Engineering, University of California, 3139 Kemper Hall, 95616, Davis, CA, USA aut Horsley D.A. Mechanical and Aeronautical Engineering Department, University of California, 95616, Davis, CA, USA aut Li X. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut Wu W. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut Wang S.Y. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut Williams R.S. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut Applied Physics A Springer-Verlag 87/2(2007-05-01), 187-192 0947-8396 87:2<187 2007 87 339 https://doi.org/10.1007/s00339-006-3836-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-006-3836-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Logeeswaran V.J. Integrated Nanodevices and System Research, Department of Electrical and Computer Engineering, University of California, 3139 Kemper Hall, 95616, Davis, CA, USA aut NATIONALLICENCE 700 1- Chan M.-L Mechanical and Aeronautical Engineering Department, University of California, 95616, Davis, CA, USA aut NATIONALLICENCE 700 1- Bayam Y. Integrated Nanodevices and System Research, Department of Electrical and Computer Engineering, University of California, 3139 Kemper Hall, 95616, Davis, CA, USA aut NATIONALLICENCE 700 1- Saif Islam M. Integrated Nanodevices and System Research, Department of Electrical and Computer Engineering, University of California, 3139 Kemper Hall, 95616, Davis, CA, USA aut NATIONALLICENCE 700 1- Horsley D.A. Mechanical and Aeronautical Engineering Department, University of California, 95616, Davis, CA, USA aut NATIONALLICENCE 700 1- Li X. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Wu W. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Wang S.Y. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Williams R.S. Quantum Science Research, Hewlett-Packard Laboratories, 1501 Page Mill Rd, MS 11-23, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/2(2007-05-01), 187-192 0947-8396 87:2<187 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer