caa a22 4500 463215907 CHVBK 20180405153156.0 cr unu---uuuuu 170326e20070501xx s 000 0 eng 10.1007/s00339-006-3834-3 doi (NATIONALLICENCE)springer-10.1007/s00339-006-3834-3 Optical metamaterials at near and mid-IR range fabricated by nanoimprint lithography [Elektronische Daten] [W. Wu, E. Kim, E. Ponizovskaya, Y. Liu, Z. Yu, N. Fang, Y.R. Shen, A.M. Bratkovsky, W. Tong, C. Sun, X. Zhang, S.-Y. Wang, R.S. Williams] Two types of optical metamaterials operating at near-IR and mid-IR frequencies, respectively, have been designed, fabricated by nanoimprint lithography (NIL), and characterized by laser spectroscopic ellipsometry. The structure for the near-IR range was a metal/dielectric/metal stack "fishnet” structure that demonstrated negative permittivity and permeability in the same frequency region and hence exhibited a negative refractive index at a wavelength near 1.7μm. In the mid-IR range, the metamaterial was an ordered array of fourfold symmetric L-shaped resonators (LSRs) that showed both a dipole plasmon resonance resulting in negative permittivity and a magnetic resonance with negative permeability near wavelengths of 3.7μm and 5.25μm, respectively. The optical properties of both metamaterials are in agreement with theoretical predictions. This work demonstrates the feasibility of designing various optical negative-index metamaterials and fabricating them using the nanoimprint lithography as a low-cost, high-throughput fabrication approach. Springer-Verlag, 2007 Wu W. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Kim E. Department of Physics, University of California, 94720, Berkeley, CA, USA aut Ponizovskaya E. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Liu Y. NSF Nano-scale Science and Engineering Center (NSEC), University of California, 94720, Berkeley, CA, USA aut Yu Z. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Fang N. Department of Mechanical & Industrial Engineering, University of Illinois, 61801, Urbana-Champagne, IL, USA aut Shen Y.R. Department of Physics, University of California, 94720, Berkeley, CA, USA aut Bratkovsky A.M. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Tong W. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Sun C. NSF Nano-scale Science and Engineering Center (NSEC), University of California, 94720, Berkeley, CA, USA aut Zhang X. NSF Nano-scale Science and Engineering Center (NSEC), University of California, 94720, Berkeley, CA, USA aut Wang S.-Y Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Williams R.S. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut Applied Physics A Springer-Verlag 87/2(2007-05-01), 143-150 0947-8396 87:2<143 2007 87 339 https://doi.org/10.1007/s00339-006-3834-3 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s00339-006-3834-3 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wu W. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Kim E. Department of Physics, University of California, 94720, Berkeley, CA, USA aut NATIONALLICENCE 700 1- Ponizovskaya E. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Liu Y. NSF Nano-scale Science and Engineering Center (NSEC), University of California, 94720, Berkeley, CA, USA aut NATIONALLICENCE 700 1- Yu Z. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Fang N. Department of Mechanical & Industrial Engineering, University of Illinois, 61801, Urbana-Champagne, IL, USA aut NATIONALLICENCE 700 1- Shen Y.R. Department of Physics, University of California, 94720, Berkeley, CA, USA aut NATIONALLICENCE 700 1- Bratkovsky A.M. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Tong W. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Sun C. NSF Nano-scale Science and Engineering Center (NSEC), University of California, 94720, Berkeley, CA, USA aut NATIONALLICENCE 700 1- Zhang X. NSF Nano-scale Science and Engineering Center (NSEC), University of California, 94720, Berkeley, CA, USA aut NATIONALLICENCE 700 1- Wang S.-Y Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 700 1- Williams R.S. Quantum Science Research, Hewlett-Packard Laboratories, 94304, Palo Alto, CA, USA aut NATIONALLICENCE 773 0- Applied Physics A Springer-Verlag 87/2(2007-05-01), 143-150 0947-8396 87:2<143 2007 87 339 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer