caa a22 4500 463220889 CHVBK 20180405153211.0 cr unu---uuuuu 170326e20070101xx s 000 0 eng 10.1007/s10853-006-1053-0 doi (NATIONALLICENCE)springer-10.1007/s10853-006-1053-0 Electron microscopy study of ion beam synthesized β-FeSi2 [Elektronische Daten] [M. Marinova, E. Sutter, M. Baleva] β-FeSi2 embedded in a Si matrix was prepared by ion beam synthesis (IBS). Two step implantation, with energies 60 and 20keV, of two different doses of the iron ions, 5×1015 and 5×1016cm−1, was performed. After the implantation, the samples were subjected to rapid thermal annealing (RTA) at 900°C. The crystal structure of the resulting material was studied using cross-sectional transmission electron microscopy (XTEM), including high-resolution electron microscopy (HREM). The comparison of the XTEM images with the initial iron ions implantation profiles, simulated by SRIM (Stopping and Range of Ions in Matter) demonstrate that the process of IBS, followed by RTA, preserves the initial implantation profile, implying a negligible Fe atoms diffusion velocity in comparison with the one of the chemical reaction between Fe and Si. The XTEM images show that continuous β-FeSi2 layers are fabricated when there is a stoichiometric region in the initial implantation profile. Fe concentration lower than the stoichiometric one in the whole implantation range results in formation of β-FeSi2 nanocrystallites embedded in the Si matrix. The behavior of the absorption coefficient energy dependences, obtained from the optical transmittance and reflectance measurements, reflects the different crystal structures forming in the two types of samples. Springer Science+Business Media, LLC, 2006 Marinova M. Faculty of Physics, Sofia University, 5 J. Boucher Blvd, 1164, Sofia, Bulgaria aut Sutter E. Center for Functional Nanomaterials, Brookhaven National Laboratory, 11973, Upton, NY, USA aut Baleva M. Faculty of Physics, Sofia University, 5 J. Boucher Blvd, 1164, Sofia, Bulgaria aut Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 207-214 0022-2461 42:1<207 2007 42 10853 https://doi.org/10.1007/s10853-006-1053-0 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1053-0 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Marinova M. Faculty of Physics, Sofia University, 5 J. Boucher Blvd, 1164, Sofia, Bulgaria aut NATIONALLICENCE 700 1- Sutter E. Center for Functional Nanomaterials, Brookhaven National Laboratory, 11973, Upton, NY, USA aut NATIONALLICENCE 700 1- Baleva M. Faculty of Physics, Sofia University, 5 J. Boucher Blvd, 1164, Sofia, Bulgaria aut NATIONALLICENCE 773 0- Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 207-214 0022-2461 42:1<207 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer