caa a22 4500 463220943 CHVBK 20180405153211.0 cr unu---uuuuu 170326e20070101xx s 000 0 eng 10.1007/s10853-006-1060-1 doi (NATIONALLICENCE)springer-10.1007/s10853-006-1060-1 Poly(dimethylsiloxane)-polyimide blends in the formation of thick polyimide films [Elektronische Daten] [L. Matienzo, F. Egitto] Thick polyimide layers can be formed by using some unique properties of poly(dimethylsiloxane)-polyimide (PDMS/PMDA-ODA) blends followed by surface modification and deposition of a second layer of polyimide precursor chemicals. The method is based on the micro-phase separation characteristics of these blends to yield surfaces that have PDMS-like character. Upon modification with UV/ozone treatment, a surface that is essentially SiO x and hydrophilic in nature is produced. This surface is amenable to reaction and deposition of a second polyimide layer from polyimide precursors. The thicker polyimide layer has enhanced adhesion between the original layer of the blend and the new polyimide layer and this approach finds extensive applications for products that require thick polymer layers. Changes in surface energy for various blend compositions were monitored by measurement of advancing contact angle with de-ionized water. Contact angle for unmodified polyimide films was on the order of 70° and it increased to about 104° after blending with PDMS and curing. UV/ozone treatment reduced the contact angle of the doped polyimide to less than 5°. X-ray photoelectron spectroscopy (XPS) and angle resolved XPS (ARXPS) measurements were used to monitor the chemical compositions of the various surfaces. High-resolution XPS spectra in the Si2p region confirm the transformation of O-Si-C bonds in PDMS to SiO x , where x is about 2. Scanning electron microscopy (SEM) of some selected samples shows that the blends contain phase separation of the polymers at the surfaces of the samples. Atomic force microscopy (AFM) of siloxane-free polyimide, and PDMS/PMDA-ODA blends both prior to and after UV/ozone exposure, show that the films are essentially flat at short treatment times (less than 60min). AFM also reveals the separation of PDMS into micro-domains at the cured film surface and throughout the layer below the surface of the blended films. Adhesion of a subsequently deposited polyimide layer to the modified polyimide surface was found to be greatly improved when compared to the adhesion obtained for deposition onto a pristine polyimide surface. Springer Science+Business Media, LLC, 2006 Matienzo L. Department of Materials Science, Endicott Interconnect Technologies, Inc., 1701 North Street bldg. 46-2, 13760, Endicott, NY, USA aut Egitto F. Department of Materials Science, Endicott Interconnect Technologies, Inc., 1701 North Street bldg. 46-2, 13760, Endicott, NY, USA aut Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 239-251 0022-2461 42:1<239 2007 42 10853 https://doi.org/10.1007/s10853-006-1060-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1060-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Matienzo L. Department of Materials Science, Endicott Interconnect Technologies, Inc., 1701 North Street bldg. 46-2, 13760, Endicott, NY, USA aut NATIONALLICENCE 700 1- Egitto F. Department of Materials Science, Endicott Interconnect Technologies, Inc., 1701 North Street bldg. 46-2, 13760, Endicott, NY, USA aut NATIONALLICENCE 773 0- Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 239-251 0022-2461 42:1<239 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer