caa a22 4500 463221028 CHVBK 20180405153212.0 cr unu---uuuuu 170326e20070101xx s 000 0 eng 10.1007/s10853-006-0842-9 doi (NATIONALLICENCE)springer-10.1007/s10853-006-0842-9 Jaworek A. Institute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, 80-952, Gdańsk, Poland aut Electrospray droplet sources for thin film deposition [Elektronische Daten] [A. Jaworek] Electrospraying utilises electrical forces for liquid atomisation. Droplets obtained by this method are highly charged to a fraction of the Rayleigh limit. The advantage of electrospraying is that the droplets can be extremely small, down to the order of 10's nanometres, and the charge and size of the droplets can be controlled to some extent be electrical means. Motion of the charged droplets can be controlled by electric field. The deposition efficiency of the charged spray on an object is usually higher than that for uncharged droplets. Electrospray is, or potentially can be applied to many processes in industry and in scientific instruments manufacturing. The paper reviews electrospray methods and devices, including liquid metal ion sources, used for thin film deposition. This technique is applied in modern material technologies, microelectronics, micromachining, and nanotechnology. Springer Science+Business Media, LLC, 2006 Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 266-297 0022-2461 42:1<266 2007 42 10853 https://doi.org/10.1007/s10853-006-0842-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-0842-9 text/html Onlinezugriff via DOI NATIONALLICENCE 100 1- Jaworek A. Institute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, 80-952, Gdańsk, Poland aut NATIONALLICENCE 773 0- Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 266-297 0022-2461 42:1<266 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer