caa a22 4500 46322132X CHVBK 20180405153213.0 cr unu---uuuuu 170326e20070101xx s 000 0 eng 10.1007/s10853-006-1056-x doi (NATIONALLICENCE)springer-10.1007/s10853-006-1056-x Study on structure of AlGaN on AlN interlayer by synchrotron radiation XRD and RBS [Elektronische Daten] [Z. Qin, H. Luo, Z. Chen, Y. Lu, T. Yu, Z. Yang, G. Zhang] The AlGaN samples have been grown on AlN interlayer (IL) by metalorganic vapor phase epitaxy (MOVPE). The effects of AlN interlayer (IL) on improvement of crystalline quality of AlGaN and Al incorporation efficiency were investigated. The samples were characterized by synchrotron radiation X-ray diffraction (XRD) and MeV He ion Rutherford backscattering spectrometry (RBS). The AlN IL played a role in suppressing edge threading dislocations (TDs) and enhancing the screw ones. It also changed the state of stress in AlGaN from tension to compression. Crack-free AlGaN films were grown successfully by inserting AlN IL. Springer Science+Business Media, LLC, 2006 81.05.Ea nationallicence 81.15.Gh nationallicence 61.10.Nz nationallicence 82.80.Yc nationallicence Qin Z. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Luo H. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Chen Z. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Lu Y. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Yu T. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Yang Z. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Zhang G. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 228-231 0022-2461 42:1<228 2007 42 10853 https://doi.org/10.1007/s10853-006-1056-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1056-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Qin Z. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 700 1- Luo H. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 700 1- Chen Z. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 700 1- Lu Y. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 700 1- Yu T. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 700 1- Yang Z. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 700 1- Zhang G. State Key Laboratory of Artificial Microstructure and Microscopic Physics, School of Physics, Peking University, 100871, Beijing, P.R. China aut NATIONALLICENCE 773 0- Journal of Materials Science Springer US; http://www.springer-ny.com 42/1(2007-01-01), 228-231 0022-2461 42:1<228 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer