caa a22 4500 463221540 CHVBK 20180405153213.0 cr unu---uuuuu 170326e20070801xx s 000 0 eng 10.1007/s10853-006-1290-2 doi (NATIONALLICENCE)springer-10.1007/s10853-006-1290-2 Investigation of PbZr0.4Ti0.6O3 capacitors with room temperature as-grown LaNiO3 electrodes [Elektronische Daten] [B. Liu, F. Li, C. Cheng, D. Wu, X. Yan, F. Bian, Z. Yan, Q. Zhao, X. Zhang] LaNiO3 (LNO) film grown at room temperature (RT) by RF magnetron sputtering is used as the electrode for integrating LaNiO3/PbZr0.4Ti0.6O3/LaNiO3 (LNO/PZT/LNO) capacitor on SrTiO3 (STO) substrate. For comparison, LNO film grown at 250°C is also used as the electrode of PZT capacitor. Reflection high energy electron diffraction (RHEED) technique is used to characterize the LNO film, it is found that LNO film prepared at 250°C is epitaxial although no diffraction pattern is found for RT as-grown LNO. Ferroelectric properties of PZT films strongly depend on the LNO bottom electrodes. The remanent polarization (P r) and coercive voltage (V c), measured at 5V, for the capacitors with LNO bottom electrodes prepared at RT and 250°C, are 20 and 37μC/cm2, 1.67 and 1.95V, respectively. No obvious degradation of polarization for PZT capacitors with RT as-grown LNO electrodes can be found. Room temperature as-grown LNO as both bottom and top electrodes to fabricate ferroelectric capacitors can save 2/3 thermal budgets, which may pay a way to decrease the potential challenges of devices resulting from the oxidation, interdiffusion or reactions during integrating ferroelectric capacitors with Si technologies. Springer Science+Business Media, LLC, 2007 Liu B. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Li F. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Cheng C. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Wu D. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Yan X. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Bian F. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Yan Z. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Zhao Q. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut Zhang X. Key Laboratory of Metastable Materials Science and Technology, Yanshan University, 066004, Qinhuangdao, Hebei, China aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/16(2007-08-01), 6956-6960 0022-2461 42:16<6956 2007 42 10853 https://doi.org/10.1007/s10853-006-1290-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1290-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Liu B. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Li F. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Cheng C. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Wu D. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Yan X. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Bian F. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Yan Z. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Zhao Q. College of Physics Science & Technology, Hebei University, 071002, Baoding, Hebei, China aut NATIONALLICENCE 700 1- Zhang X. Key Laboratory of Metastable Materials Science and Technology, Yanshan University, 066004, Qinhuangdao, Hebei, China aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/16(2007-08-01), 6956-6960 0022-2461 42:16<6956 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer