caa a22 4500 463224566 CHVBK 20180405153222.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s10853-006-1269-z doi (NATIONALLICENCE)springer-10.1007/s10853-006-1269-z Stress-impedance effects in sandwiched FeCuNbCrSiB/Cu/FeCuNbCrSiB films fabricated by Microelectromechanical Systems technique [Elektronische Daten] [Zhimin Zhou, Ying Cao, Yong Zhou, Ji-An Chen, Wen Ding] Sandwiched FeCuNbCrSiB/Cu/FeCuNbCrSiB films with a serpentine structure have been realized on silicon cantilever by Microelectromechanical Systems technique, and the stress-impedance (SI) effects have been studied in the frequency range of 1-40MHz. Experimental results show that the values of SI ratio increase with the deflection and a large SI ratio of −24.1% at 5MHz with the average tension stress 69.9MPa and strain 0.048% is obtained in the sandwiched FeCuNbCrSiB/Cu/FeCuNbCrSiB films, which shows attractive for the applications of strain sensors. Springer Science+Business Media, LLC, 2006 Zhou Zhimin National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut Cao Ying National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut Zhou Yong National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut Chen Ji-An National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut Ding Wen National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/7(2007-04-01), 2450-2454 0022-2461 42:7<2450 2007 42 10853 https://doi.org/10.1007/s10853-006-1269-z text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1269-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zhou Zhimin National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut NATIONALLICENCE 700 1- Cao Ying National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut NATIONALLICENCE 700 1- Zhou Yong National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut NATIONALLICENCE 700 1- Chen Ji-An National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut NATIONALLICENCE 700 1- Ding Wen National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/7(2007-04-01), 2450-2454 0022-2461 42:7<2450 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer