caa a22 4500 463225090 CHVBK 20180405153224.0 cr unu---uuuuu 170326e20070601xx s 000 0 eng 10.1007/s10853-006-1414-8 doi (NATIONALLICENCE)springer-10.1007/s10853-006-1414-8 Improvement electrical properties of sol-gel derived lead zirconate titanate thick films for ultrasonic transducer application [Elektronische Daten] [Q. Zhou, K. Shung, Y. Huang] In this work, a fabrication process of piezoelectric PZT [Pb(Zr0.52Ti0.48)O3] thick films up to 60μm deposited on silicon and aluminum substrates is reported. Crystalline spherical modified PZT powder about 300nm in diameter was used as filler. PZT polymeric precursor produced by Chemat Inc. was used as the matrix material. Spinning films were annealed at 700°C for one hour in the furnace in air. The thickness of the thick films was measured using a scanning electron microscope (SEM). Compared with previous piezoelectric PZT composite films, the modified piezoelectric thick films exhibit better dielectric properties. The dielectric constant is over 780 and dielectric loss is 0.04 at 1KHz. Using a PiezoCAD model, the high frequency transducer was designed and fabricated. It showed a bandwidth of 75% at 40MHz. Springer Science+Business Media, LLC, 2007 Zhou Q. NIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, 90089, Los Angeles, CA, USA aut Shung K. NIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, 90089, Los Angeles, CA, USA aut Huang Y. Chemat Technology Inc., 91324, Northridge, CA, USA aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/12(2007-06-01), 4480-4484 0022-2461 42:12<4480 2007 42 10853 https://doi.org/10.1007/s10853-006-1414-8 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1414-8 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Zhou Q. NIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, 90089, Los Angeles, CA, USA aut NATIONALLICENCE 700 1- Shung K. NIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, 90089, Los Angeles, CA, USA aut NATIONALLICENCE 700 1- Huang Y. Chemat Technology Inc., 91324, Northridge, CA, USA aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/12(2007-06-01), 4480-4484 0022-2461 42:12<4480 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer