caa a22 4500 463227107 CHVBK 20180405153230.0 cr unu---uuuuu 170326e20070501xx s 000 0 eng 10.1007/s10853-007-1562-5 doi (NATIONALLICENCE)springer-10.1007/s10853-007-1562-5 Strain analysis of a GaN epilayer grown on a c-plane sapphire substrate with different growth times [Elektronische Daten] [S. Cho, K. Chang, Myoung Kwon] The strain analysis of a GaN epilayer with different growth times on a c-plane sapphire substrate via a two-step growth method, using low-pressure, metalorganic chemical vapor deposition, was conducted based on the precise measurement of the lattice parameters, using high-resolution X-ray diffraction. The high-temperature growth time was changed at a fixed growth condition. The c- and a-lattice parameters were measured, followed by the out-of-plane and in-plane strains. Then, the biaxial and hydrostatic components were extracted from the total strain values obtained, and were discussed in this paper as functions of GaN growth time. Springer Science+Business Media, LLC, 2007 Cho S. Department of Chemical Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, 130-743, Seoul, South Korea aut Chang K. Department of Chemical Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, 130-743, Seoul, South Korea aut Kwon Myoung Department of Materials Science and Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, 130-743, Seoul, South Korea aut Journal of Materials Science Springer US; http://www.springer-ny.com 42/10(2007-05-01), 3569-3572 0022-2461 42:10<3569 2007 42 10853 https://doi.org/10.1007/s10853-007-1562-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-007-1562-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Cho S. Department of Chemical Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, 130-743, Seoul, South Korea aut NATIONALLICENCE 700 1- Chang K. Department of Chemical Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, 130-743, Seoul, South Korea aut NATIONALLICENCE 700 1- Kwon Myoung Department of Materials Science and Engineering, University of Seoul, 90 Jeonnong-dong, Dongdaemun-gu, 130-743, Seoul, South Korea aut NATIONALLICENCE 773 0- Journal of Materials Science Springer US; http://www.springer-ny.com 42/10(2007-05-01), 3569-3572 0022-2461 42:10<3569 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer