caa a22 4500 463228227 CHVBK 20180405153233.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s10853-007-1584-z doi (NATIONALLICENCE)springer-10.1007/s10853-007-1584-z Effect of inner oxygen on the interfacial layer formation for HfO2 gate dielectric [Elektronische Daten] [Ran Jiang, E. Xie, Z. Wang] The interfacial layer (IL) formed at the HfO2/Si interface was investigated by using Fourier transform infrared spectroscopy (FT-IR), transmission electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). Differently with the previous reports, it is concluded that the inner oxygen from bulk film predominates the oxidation process in interface region rather than the oxygen introduced from outer environment. First, from FT-IR, it is found that the formation of the IL strongly relies on the annealing temperature but does not obviously rely on the HfO2 thickness and the annealing atmosphere. Second, the contradistinctive images of Hf/Si annealed in oxygen ambient and Hf/SiO2 annealed in vacuum were investigated by TEM, which confirms the conclusion obtained from FT-IR data that the IL is formed not by a diffusion of the oxygen from the annealing atmosphere, but by a reaction within the interface region. Third, the Hf 4f, O 1s, and Si 2p core-level energy states of Hf/SiO2 stack annealed in vacuum were investigated by XPS using two ways, one is investigating the samples annealed in vacuum for varied time and the other is investigating the fully oxidized sample in different depth. Based on the experiments, it is concluded that the inner oxygen from bulk films (HfO2 or SiO2) has greater influence on the IL formation comparing with the outer oxygen from environment. Springer Science+Business Media, LLC, 2007 Jiang Ran School of Physical Science and Technology, Lanzhou University, 730000, Lanzhou, China aut Xie E. School of Physical Science and Technology, Lanzhou University, 730000, Lanzhou, China aut Wang Z. School of Physical Science and Technology, Lanzhou University, 730000, Lanzhou, China aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/17(2007-09-01), 7343-7347 0022-2461 42:17<7343 2007 42 10853 https://doi.org/10.1007/s10853-007-1584-z text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-007-1584-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jiang Ran School of Physical Science and Technology, Lanzhou University, 730000, Lanzhou, China aut NATIONALLICENCE 700 1- Xie E. School of Physical Science and Technology, Lanzhou University, 730000, Lanzhou, China aut NATIONALLICENCE 700 1- Wang Z. School of Physical Science and Technology, Lanzhou University, 730000, Lanzhou, China aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/17(2007-09-01), 7343-7347 0022-2461 42:17<7343 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer