caa a22 4500 463228251 CHVBK 20180405153233.0 cr unu---uuuuu 170326e20070901xx s 000 0 eng 10.1007/s10853-007-1587-9 doi (NATIONALLICENCE)springer-10.1007/s10853-007-1587-9 The effect of annealing time on r.f. magnetron sputtered La3Ga5SiO14 films [Elektronische Daten] [Feng-Wei Wang, Yi Hu, Hur-Lon Lin] La3Ga5SiO14 (LGS) thin films have been grown by r.f. sputtering at 600°C on (200)-textured MgO buffer layers deposited also by r.f. sputtering on Si substrates. The evolution of crystalline phases in the thin films as a function of time was examined by X-ray diffraction and scanning electron microscopy before and after annealing in air for various times. The morphology of the crystals formed and their formation mechanism were discussed. Springer Science+Business Media, LLC, 2007 Wang Feng-Wei Department of Materials Engineering, Tatung University, 40 ChungShan North Road, 3rd Section, 104, Taipei, Taiwan, ROC aut Hu Yi Department of Materials Engineering, Tatung University, 40 ChungShan North Road, 3rd Section, 104, Taipei, Taiwan, ROC aut Lin Hur-Lon Department of Materials Engineering, Tatung University, 40 ChungShan North Road, 3rd Section, 104, Taipei, Taiwan, ROC aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/17(2007-09-01), 7307-7310 0022-2461 42:17<7307 2007 42 10853 https://doi.org/10.1007/s10853-007-1587-9 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-007-1587-9 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Wang Feng-Wei Department of Materials Engineering, Tatung University, 40 ChungShan North Road, 3rd Section, 104, Taipei, Taiwan, ROC aut NATIONALLICENCE 700 1- Hu Yi Department of Materials Engineering, Tatung University, 40 ChungShan North Road, 3rd Section, 104, Taipei, Taiwan, ROC aut NATIONALLICENCE 700 1- Lin Hur-Lon Department of Materials Engineering, Tatung University, 40 ChungShan North Road, 3rd Section, 104, Taipei, Taiwan, ROC aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/17(2007-09-01), 7307-7310 0022-2461 42:17<7307 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer