caa a22 4500 463229037 CHVBK 20180405153236.0 cr unu---uuuuu 170326e20070701xx s 000 0 eng 10.1007/s10853-006-0658-7 doi (NATIONALLICENCE)springer-10.1007/s10853-006-0658-7 Morphology, microstructure, and residual stress in EBPVD erbia coatings [Elektronische Daten] [Alan Jankowski, Cheng Saw, James Ferreira, Jennifer Harper, Jeffrey Hayes, Bruce Pint] The electron-beam physical vapor deposition of erbium-oxide coatings onto sapphire wafers is investigated to evaluate processing effects on the residual stress state and microstructure. The erbium-oxide coatings are found to be in a compressive stress state. The crystallographic texture of the erbium-oxide coating is evaluated using X-ray diffraction along with an assessment of forming the cubic erbia phase as a function of substrate temperature. In addition to the cubic erbia phase, an orthorhombic phase is found at the lower deposition temperatures. A transition is found from a two-phase erbium-oxide coating to a single phase at deposition temperatures above 948K. The variation in morphology with deposition temperature observed in fracture cross-sections is consistent with features of the classic zone growth models for vapor-deposited oxide coatings. For high-temperature applications, a deposition process temperature above 948K is seen to produce a stoichiometric, fully dense, and equiaxed-polycrystalline coating of cubic erbia. Springer Science+Business Media, LLC, 2007 Jankowski Alan Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut Saw Cheng Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut Ferreira James Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut Harper Jennifer Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut Hayes Jeffrey Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut Pint Bruce Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831, Oak Ridge, TN, USA aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/14(2007-07-01), 5722-5727 0022-2461 42:14<5722 2007 42 10853 https://doi.org/10.1007/s10853-006-0658-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-0658-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jankowski Alan Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut NATIONALLICENCE 700 1- Saw Cheng Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut NATIONALLICENCE 700 1- Ferreira James Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut NATIONALLICENCE 700 1- Harper Jennifer Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut NATIONALLICENCE 700 1- Hayes Jeffrey Materials Science and Technology Division, Lawrence Livermore National Laboratory, Mail Stop L-352, P.O. Box 808, 94550, Livermore, CA, USA aut NATIONALLICENCE 700 1- Pint Bruce Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831, Oak Ridge, TN, USA aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/14(2007-07-01), 5722-5727 0022-2461 42:14<5722 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer