caa a22 4500 46322924X CHVBK 20180405153236.0 cr unu---uuuuu 170326e20070701xx s 000 0 eng 10.1007/s10853-006-0730-3 doi (NATIONALLICENCE)springer-10.1007/s10853-006-0730-3 Luminescence from praseodymium doped AlN thin films deposited by RF magnetron sputtering and the effect of material structure and thermal annealing on the luminescence [Elektronische Daten] [Muhammad Maqbool, Hugh Richardson, Martin Kordesch] Thin films of Praseodymium doped AlN are deposited on silicon (111) substrates at 77K and 950K by rf magnetron sputtering method. About 500-1000nm thick films are grown at 100-200 watts RF power and 5-8mTorr nitrogen, using a metal target of Al with Pr. X-rays diffraction results show that films deposited at 77K are amorphous and those deposited at 950K are crystalline. Cathodoluminescence studies are performed at room temperature and luminescence peaks are observed in a wide range from ultraviolet to infrared region. The most intense peak is obtained in green at 526nm from amorphous films as a result from 3P1→3H5 transition. In crystalline films the intense peak was obtain in red at 648nm as a result from 3P0→3F2 transition. Films are thermally activated at 1300K for half an hour in a nitrogen atmosphere. Thermal activation enhances the intensity of luminescence. Two peaks at 488nm and 505nm merged after thermal activation, giving rise to a single peak at 495nm. Springer Science+Business Media, LLC, 2007 Maqbool Muhammad Department of Science & Mathematics, Mount Olive College, 634 Henderson Street, 28365, Mount Olive, NC, USA aut Richardson Hugh Condensed Matter & Surface Sciences Program, Ohio University, 45701, Athens, OH, USA aut Kordesch Martin Condensed Matter & Surface Sciences Program, Ohio University, 45701, Athens, OH, USA aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/14(2007-07-01), 5657-5660 0022-2461 42:14<5657 2007 42 10853 https://doi.org/10.1007/s10853-006-0730-3 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-0730-3 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Maqbool Muhammad Department of Science & Mathematics, Mount Olive College, 634 Henderson Street, 28365, Mount Olive, NC, USA aut NATIONALLICENCE 700 1- Richardson Hugh Condensed Matter & Surface Sciences Program, Ohio University, 45701, Athens, OH, USA aut NATIONALLICENCE 700 1- Kordesch Martin Condensed Matter & Surface Sciences Program, Ohio University, 45701, Athens, OH, USA aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/14(2007-07-01), 5657-5660 0022-2461 42:14<5657 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer