caa a22 4500 463230582 CHVBK 20180405153240.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s10853-006-1367-y doi (NATIONALLICENCE)springer-10.1007/s10853-006-1367-y Effect of the oxygen pressure on the photoluminescence properties of ZnO thin films by PLD [Elektronische Daten] [X. Fan, J. Lian, Qing Jiang, ZuoWan Zhou] ZnO thin films on Si(111) substrate were deposited by laser ablation of Zn target in oxygen reactive atmosphere; Nd-YAG laser with wavelength of 1064nm was used as laser source. The experiments were performed at laser energy density of 31J/cm2, substrate temperature of 400°C and various oxygen pressures (5-65Pa). X-ray diffraction was applied to characterize the structure of the deposited ZnO films and the optical properties of the ZnO thin films were characterized by photoluminescence with an Ar ion laser as a light source using an excitation wavelength of 325nm. The influence of the oxygen pressure on the structural and optical properties of ZnO thin films was investigated. It was found that ZnO film with random growth grains can be obtained under the condition of oxygen pressure 5-65Pa. It will be clearly shown that the grain size and the formation of intrinsic defects depend on the oxygen partial pressure and that high optical quality of the ZnO films is obtained under low oxygen pressure (5Pa, 11Pa) conditions. Springer Science+Business Media, LLC, 2007 Fan X. College of Materials Engineering, Southwest Jiaotong University, 610031, Chengdu, Sichuan, China aut Lian J. Key Lab of Automobile Materials, Ministry of Education, College of Materials Science and Engineering, Jilin University, 130025, Changchun, China aut Jiang Qing Key Lab of Automobile Materials, Ministry of Education, College of Materials Science and Engineering, Jilin University, 130025, Changchun, China aut Zhou ZuoWan College of Materials Engineering, Southwest Jiaotong University, 610031, Chengdu, Sichuan, China aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/8(2007-04-01), 2678-2683 0022-2461 42:8<2678 2007 42 10853 https://doi.org/10.1007/s10853-006-1367-y text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1367-y text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Fan X. College of Materials Engineering, Southwest Jiaotong University, 610031, Chengdu, Sichuan, China aut NATIONALLICENCE 700 1- Lian J. Key Lab of Automobile Materials, Ministry of Education, College of Materials Science and Engineering, Jilin University, 130025, Changchun, China aut NATIONALLICENCE 700 1- Jiang Qing Key Lab of Automobile Materials, Ministry of Education, College of Materials Science and Engineering, Jilin University, 130025, Changchun, China aut NATIONALLICENCE 700 1- Zhou ZuoWan College of Materials Engineering, Southwest Jiaotong University, 610031, Chengdu, Sichuan, China aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/8(2007-04-01), 2678-2683 0022-2461 42:8<2678 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer