caa a22 4500 463231775 CHVBK 20180405153244.0 cr unu---uuuuu 170326e20071201xx s 000 0 eng 10.1007/s10853-007-2090-z doi (NATIONALLICENCE)springer-10.1007/s10853-007-2090-z Wetting and reaction between Si droplet and SiO2 substrate [Elektronische Daten] [Hideyuki Kanai, Sunao Sugihara, Hiroshi Yamaguchi, Tomonori Uchimaru, Naoyuki Obata, Toshiyuki Kikuchi, Fusaki Kimura, Masato Ichinokura] The wetting and reaction between Si melt and SiO2 substrate were investigated as a function of the atmosphere, temperature, and degree of vacuum. The results revealed that below 2Torr with an Ar flow, the wetting angle is finally 90°. The Si droplet was stationary at a wetting angle of 90°. Videos indicated that the droplets moved and vibrated; Above 20Torr, the Si droplet vibrated up and down with a frequency of approximately 2Hz, thereby changing the wetting angle. Further, the droplet remained stationary on a substrate on which grooves with a width of 100μm and depth of 100μm were etched with a pitch of 1mm. The presence of grooves or dimples on the substrates facilitated the leakage of SiO gas; as a result, the Si droplet did not vibrate. A vibration model was proposed in which the SiO gas produced at the interface between the Si droplet and the substrate according to the reaction Si+SiO=2SiO expands and leaks continuously. Springer Science+Business Media, LLC, 2007 Kanai Hideyuki Analysis Technology Group, Core Technology Center, Covalent Materials Corporation, 30 Soya, 257-8566, Hadano-shi, Japan aut Sugihara Sunao Department of Materials Science and Ceramic Technology, Shonan Institute of Technology, 1-1-25 Tsujido Nishikaigan, 251-8511, Fujisawa-shi, Japan aut Yamaguchi Hiroshi Analysis Technology Group, Core Technology Center, Covalent Materials Corporation, 30 Soya, 257-8566, Hadano-shi, Japan aut Uchimaru Tomonori Analysis Technology Group, Core Technology Center, Covalent Materials Corporation, 30 Soya, 257-8566, Hadano-shi, Japan aut Obata Naoyuki Quartz Crucibles Business Unit, Process Materials Division, Ceramics Business Group, Covalent Materials Corporation, 378 Ogunimachi Nishi-okitamagun, 999-1351, Yamagata, Japan aut Kikuchi Toshiyuki Quartz Crucibles Business Unit, Process Materials Division, Ceramics Business Group, Covalent Materials Corporation, 378 Ogunimachi Nishi-okitamagun, 999-1351, Yamagata, Japan aut Kimura Fusaki Quartz Crucibles Business Unit, Process Materials Division, Ceramics Business Group, Covalent Materials Corporation, 378 Ogunimachi Nishi-okitamagun, 999-1351, Yamagata, Japan aut Ichinokura Masato Technology Development Ceramic Business Group, Covalent Materials Corporation, Nissei Bldg., 6-3 Osaki 1-chome, Shinagawa-ku, 141-0032, Tokyo, Japan aut Journal of Materials Science Springer US; http://www.springer-ny.com 42/23(2007-12-01), 9529-9535 0022-2461 42:23<9529 2007 42 10853 https://doi.org/10.1007/s10853-007-2090-z text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-007-2090-z text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Kanai Hideyuki Analysis Technology Group, Core Technology Center, Covalent Materials Corporation, 30 Soya, 257-8566, Hadano-shi, Japan aut NATIONALLICENCE 700 1- Sugihara Sunao Department of Materials Science and Ceramic Technology, Shonan Institute of Technology, 1-1-25 Tsujido Nishikaigan, 251-8511, Fujisawa-shi, Japan aut NATIONALLICENCE 700 1- Yamaguchi Hiroshi Analysis Technology Group, Core Technology Center, Covalent Materials Corporation, 30 Soya, 257-8566, Hadano-shi, Japan aut NATIONALLICENCE 700 1- Uchimaru Tomonori Analysis Technology Group, Core Technology Center, Covalent Materials Corporation, 30 Soya, 257-8566, Hadano-shi, Japan aut NATIONALLICENCE 700 1- Obata Naoyuki Quartz Crucibles Business Unit, Process Materials Division, Ceramics Business Group, Covalent Materials Corporation, 378 Ogunimachi Nishi-okitamagun, 999-1351, Yamagata, Japan aut NATIONALLICENCE 700 1- Kikuchi Toshiyuki Quartz Crucibles Business Unit, Process Materials Division, Ceramics Business Group, Covalent Materials Corporation, 378 Ogunimachi Nishi-okitamagun, 999-1351, Yamagata, Japan aut NATIONALLICENCE 700 1- Kimura Fusaki Quartz Crucibles Business Unit, Process Materials Division, Ceramics Business Group, Covalent Materials Corporation, 378 Ogunimachi Nishi-okitamagun, 999-1351, Yamagata, Japan aut NATIONALLICENCE 700 1- Ichinokura Masato Technology Development Ceramic Business Group, Covalent Materials Corporation, Nissei Bldg., 6-3 Osaki 1-chome, Shinagawa-ku, 141-0032, Tokyo, Japan aut NATIONALLICENCE 773 0- Journal of Materials Science Springer US; http://www.springer-ny.com 42/23(2007-12-01), 9529-9535 0022-2461 42:23<9529 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer