caa a22 4500 46323345X CHVBK 20180405153249.0 cr unu---uuuuu 170326e20070701xx s 000 0 eng 10.1007/s10853-006-1267-1 doi (NATIONALLICENCE)springer-10.1007/s10853-006-1267-1 The influence of diluent gas composition and temperature on SiC nanopowder formation by CVD [Elektronische Daten] [Aparna Gupta, Tridib Ghosh, Chacko Jacob] Crystalline cubic silicon carbide (3C-SiC) nanopowders were synthesized using hexamethyldisilane (HMDS) in a resistance heated chemical vapour deposition (CVD) reactor. The effects of different diluent gases on the synthesis of the SiC powder were also studied. The deposited powder was characterized using high-resolution X-ray diffraction (HRXRD) analysis, transmission electron microscopy (TEM), high-resolution TEM (HRTEM) and BET surface area measurements. The crystallite size was estimated to be in the range of nanometer (10-20nm) from XRD data and the particle size (∼10-30nm) was obtained by TEM, HRTEM and BET. The growth condition was optimized in terms of crystallinity, chemical composition and deposition rate by varying different parameters such as the diluent gas (H2/Ar ratio) and temperature. Springer Science+Business Media, LLC, 2007 Gupta Aparna Materials Science Centre, Indian Institute of Technology, 721302, Kharagpur, India aut Ghosh Tridib Department of Electrical Engineering, Indian Institute of Technology, 721302, Kharagpur, India aut Jacob Chacko Materials Science Centre, Indian Institute of Technology, 721302, Kharagpur, India aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/13(2007-07-01), 5142-5146 0022-2461 42:13<5142 2007 42 10853 https://doi.org/10.1007/s10853-006-1267-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1267-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Gupta Aparna Materials Science Centre, Indian Institute of Technology, 721302, Kharagpur, India aut NATIONALLICENCE 700 1- Ghosh Tridib Department of Electrical Engineering, Indian Institute of Technology, 721302, Kharagpur, India aut NATIONALLICENCE 700 1- Jacob Chacko Materials Science Centre, Indian Institute of Technology, 721302, Kharagpur, India aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/13(2007-07-01), 5142-5146 0022-2461 42:13<5142 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer