caa a22 4500 463233786 CHVBK 20180405153250.0 cr unu---uuuuu 170326e20070601xx s 000 0 eng 10.1007/s10853-006-0454-4 doi (NATIONALLICENCE)springer-10.1007/s10853-006-0454-4 Effects of the deposition and patterning processes of the top electrode on the ferroelectric properties of Pt/Pb(Zr,Ti)O3/Pt thin film capacitors [Elektronische Daten] [Eun Lee, Jae Lee, Sun Kim] The deformation in the hysteresis loop of Pt/PZT/Pt thin film capacitors due to deposition and patterning processes of the top electrode has been investigated. The PZT film was aged during the deposition of the top electrode and was positively poled during reactive ion etching (RIE) of the top electrode. The PZT film having sputtered top electrode was very sensitive to the RIE process. The film with a thinner top electrode showed less initial switching polarization due to less compressive stress, but better fatigue characteristics due to an enhanced partial switching region. Springer Science+Business Media, LLC, 2007 Lee Eun Department of Materials Engineering, Chosun University, 501-759, Gwangju, Korea aut Lee Jae School of Metallurgical and Materials Engineering, Kookmin University, 136-707, Seoul, Korea aut Kim Sun Department of Nano Science and Technology, Sejong University, 143-747, Seoul, Korea aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/11(2007-06-01), 3772-3777 0022-2461 42:11<3772 2007 42 10853 https://doi.org/10.1007/s10853-006-0454-4 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-0454-4 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Lee Eun Department of Materials Engineering, Chosun University, 501-759, Gwangju, Korea aut NATIONALLICENCE 700 1- Lee Jae School of Metallurgical and Materials Engineering, Kookmin University, 136-707, Seoul, Korea aut NATIONALLICENCE 700 1- Kim Sun Department of Nano Science and Technology, Sejong University, 143-747, Seoul, Korea aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/11(2007-06-01), 3772-3777 0022-2461 42:11<3772 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer