caa a22 4500 463234073 CHVBK 20180405153251.0 cr unu---uuuuu 170326e20070801xx s 000 0 eng 10.1007/s10853-006-1166-5 doi (NATIONALLICENCE)springer-10.1007/s10853-006-1166-5 Methods for the reduction of the micropipe density in SiC single crystals [Elektronische Daten] [Jun Liu, Ji Gao, Ji Cheng, Jian Yang, Guan Qiao] Micropipes are very harmful for SiC devices. Even one micropipe in the active area can destroy a high-voltage SiC device. Therefore, it is necessary to reduce the density of micropipes in SiC single crystals. In the present paper, we proposed methods for reducing micropipes. Restriction of screw dislocations and decrease of inclusions are the key factors to reduce the number of micropipes. (0 0 0 1) Si-face, $$ (11\bar 20) $$ and $$ (1\bar 100) $$ crystal faces acted as growth surface in different experiments. Active carbon was appended to act as carbon source. The crucible and active carbon were subjected to X-ray diffraction investigation before and after growth. The experimental results indicate that the activity of the graphite crucible was low, and it decreased with the progressing crystal growth, which increased the probability of micropipe formation. Appending active carbon can act as ample carbon source for crystal growth. The reduction of micropipes was achieved by the restrained formation of Si liquid phase. Using $$ (11\bar 20) $$ and $$ (1\bar 100) $$ crystal faces as the growth surfaces the generation of micropipes was restricted, as no new micropipe generated on the $$ (11\bar 20) $$ and $$ (1\bar 100) $$ crystal faces. At the same time, the density of edge dislocations is reduced considerably. Springer Science+Business Media, LLC, 2007 Liu Jun State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut Gao Ji State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut Cheng Ji State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut Yang Jian State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut Qiao Guan State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/15(2007-08-01), 6148-6152 0022-2461 42:15<6148 2007 42 10853 https://doi.org/10.1007/s10853-006-1166-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10853-006-1166-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Liu Jun State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut NATIONALLICENCE 700 1- Gao Ji State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut NATIONALLICENCE 700 1- Cheng Ji State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut NATIONALLICENCE 700 1- Yang Jian State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut NATIONALLICENCE 700 1- Qiao Guan State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, 710049, Xi'an, Shaanxi, P.R. China aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 42/15(2007-08-01), 6148-6152 0022-2461 42:15<6148 2007 42 10853 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer