caa a22 4500 46323488X CHVBK 20180405153253.0 cr unu---uuuuu 170326e20070201xx s 000 0 eng 10.1007/s10404-006-0111-x doi (NATIONALLICENCE)springer-10.1007/s10404-006-0111-x Glass reflow on 3-dimensional micro-apertures for electrophysiological measurements on-chip [Elektronische Daten] [T. Lehnert, D. Nguyen, L. Baldi, M. Gijs] We propose a new method to fabricate micro-apertures for on-chip electrophysiological measurements of living cells. Thermal reflow of phosphosilicate glass (PSG) is applied to funnel- or nozzle-type microstructures to generate very smooth surfaces on the finalized chip. Such 3-dimensional microstructures show close similarities to fire-polished glass pipette tips. Immobilized cells fit perfectly to these structures offering a large contact area for sealing between the cell membrane and the oxide surface. A tight cell/chip-aperture seal is an important requirement for the present application. We demonstrate the formation of stable gigaseals with Chinese hamster ovary (CHO) cells for both types of microstructures without the need of any post-fabrication surface treatment. By adjusting the PSG reflow parameters, the shape of the apertures can be modified and diameters down to the sub-micrometer range may be achieved. The application of PSG reflow to MEMS fabrication is an interesting new option to create unconventional microstructures. Springer-Verlag, 2006 Patch-clamp microsystem nationallicence Micronozzle nationallicence Microfunnel nationallicence PSG reflow nationallicence Lehnert T. Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut Nguyen D. Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut Baldi L. Integrative Bioscience Institute, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut Gijs M. Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut Microfluidics and Nanofluidics Springer-Verlag 3/1(2007-02-01), 109-117 1613-4982 3:1<109 2007 3 10404 https://doi.org/10.1007/s10404-006-0111-x text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10404-006-0111-x text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Lehnert T. Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut NATIONALLICENCE 700 1- Nguyen D. Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut NATIONALLICENCE 700 1- Baldi L. Integrative Bioscience Institute, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut NATIONALLICENCE 700 1- Gijs M. Institute of Microelectronics and Microsystems, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015, Lausanne, Switzerland aut NATIONALLICENCE 773 0- Microfluidics and Nanofluidics Springer-Verlag 3/1(2007-02-01), 109-117 1613-4982 3:1<109 2007 3 10404 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer