caa a22 4500 463234995 CHVBK 20180405153254.0 cr unu---uuuuu 170326e20071201xx s 000 0 eng 10.1007/s10404-007-0175-2 doi (NATIONALLICENCE)springer-10.1007/s10404-007-0175-2 On the air damping of flexible microbeam in free space at the free-molecule regime [Elektronische Daten] [Pu Li, Rufu Hu] Predicting air damping is crucial in the design of high Q microelectromechanical systems. In the past, air damping of rigid microbeam in free space at molecular regime is usually estimated using the free molecular model proposed by Christian (Vacuum 16:175-178, 1966), air damping of flexible microbeam is estimated using the model proposed by Blom (J Vac Sci Technol B 10:19-26, 1992). The relation between the two models is Q Blom = 3Q Christian. In this paper, a general proof is presented that shows the Christian's model is valid for the air damping of flexible microbeam in free space at molecular regime. By comparing with the experimental results available in the literatures (Blom etal. in J Vac Sci Technol B 10:19-26, 1992; Yasumura etal. in J Micromech Syst 9:117-125, 2000), we conclude that the Christian's model is the best choice in predicting the air damping of flexible microbeam in free space at the molecular regime. Springer-Verlag, 2007 Air damping nationallicence Microbeam nationallicence Flexibility nationallicence Free molecular model nationallicence Modal analysis nationallicence Li Pu Department of Mechanical Engineering, Southeast University, 210096, Nanjing, People's Republic of China aut Hu Rufu Department of Mechanical Engineering, Southeast University, 210096, Nanjing, People's Republic of China aut Microfluidics and Nanofluidics Springer-Verlag 3/6(2007-12-01), 715-721 1613-4982 3:6<715 2007 3 10404 https://doi.org/10.1007/s10404-007-0175-2 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10404-007-0175-2 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Li Pu Department of Mechanical Engineering, Southeast University, 210096, Nanjing, People's Republic of China aut NATIONALLICENCE 700 1- Hu Rufu Department of Mechanical Engineering, Southeast University, 210096, Nanjing, People's Republic of China aut NATIONALLICENCE 773 0- Microfluidics and Nanofluidics Springer-Verlag 3/6(2007-12-01), 715-721 1613-4982 3:6<715 2007 3 10404 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer