caa a22 4500 463235436 CHVBK 20180405153255.0 cr unu---uuuuu 170326e20070401xx s 000 0 eng 10.1007/s10404-006-0116-5 doi (NATIONALLICENCE)springer-10.1007/s10404-006-0116-5 Fabrication and testing of bubble powered micropumps using embedded microheater [Elektronische Daten] [Jung-Yeul Jung, Ho-Young Kwak] A bubble-powered micropump which consists of a pair of nozzle-diffuser flow controller and a pumping chamber was fabricated and tested in this study. The two-parallel micro line heaters were fabricated to be embedded in the silicon dioxide layer above a silicon wafer which serves as a base plate for the micropump. A pumping chamber, a pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Sequential photographs of bubble nucleation, growth and collapse were visualized by CCD camera. The liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the collapse period can be clearly seen. The volume flow rate was found to be dependent on the duty ratio and the operation frequency. The volume flow rate decreases as the duty ratio increases in the micropump with either circular or square pumping chamber. Springer-Verlag, 2006 Bubble-powered nationallicence Microheater nationallicence Micropump nationallicence Visualization nationallicence Jung Jung-Yeul Department of Mechanical Engineering, Chung-Ang University, 156-756, Seoul, South Korea aut Kwak Ho-Young Department of Mechanical Engineering, Chung-Ang University, 156-756, Seoul, South Korea aut Microfluidics and Nanofluidics Springer-Verlag 3/2(2007-04-01), 161-169 1613-4982 3:2<161 2007 3 10404 https://doi.org/10.1007/s10404-006-0116-5 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10404-006-0116-5 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Jung Jung-Yeul Department of Mechanical Engineering, Chung-Ang University, 156-756, Seoul, South Korea aut NATIONALLICENCE 700 1- Kwak Ho-Young Department of Mechanical Engineering, Chung-Ang University, 156-756, Seoul, South Korea aut NATIONALLICENCE 773 0- Microfluidics and Nanofluidics Springer-Verlag 3/2(2007-04-01), 161-169 1613-4982 3:2<161 2007 3 10404 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer