Heat and mass transfer in an epitaxial reactor of the vertical type 1. Symmetrical heating of the reactor

Verfasser / Beitragende:
[V. Popov]
Ort, Verlag, Jahr:
1989
Enthalten in:
Journal of engineering physics, 56/6(1989-06-01), 653-658
Format:
Artikel (online)
ID: 465558135