caa a22 4500 465732208 CHVBK 20180323111744.0 cr unu---uuuuu 170327e19900801xx s 000 0 eng 10.1007/BF02035799 doi (NATIONALLICENCE)springer-10.1007/BF02035799 Determination of the concentrations of trace and doping elements in GaAs by neutron activation analysis [Elektronische Daten] [R. Liu, P. Chen, Z. Alfassi, M. Yang] The concentrations of ten trace and dopant elements in GaAs semiconductor were determined by reactor neutron activation analysis after removal of As by evaporation of AsCl3. The retentions of the elements of interest were measured using radiotracers. The concentrations of doping elements (Te, Cr and Zn) in commercial GaAs samples were compared to the limit of detection of these elements to analyze the possibility to use NAA for concentration depth profiling measurements. The NAA results were compared with those of electrical measurements and SIMS and the discrepancies found are discussed. Akadémiai Kiadó, 1990 Liu R. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C. aut Chen P. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C. aut Alfassi Z. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C. aut Yang M. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C. aut Journal of Radioanalytical and Nuclear Chemistry Kluwer Academic Publishers 141/2(1990-08-01), 317-326 0236-5731 141:2<317 1990 141 10967 https://doi.org/10.1007/BF02035799 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02035799 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Liu R. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C aut NATIONALLICENCE 700 1- Chen P. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C aut NATIONALLICENCE 700 1- Alfassi Z. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C aut NATIONALLICENCE 700 1- Yang M. Institute of Nuclear Science, National Tsing Hua University, 30043, Hsinchu, Taiwan (R.O.C aut NATIONALLICENCE 773 0- Journal of Radioanalytical and Nuclear Chemistry Kluwer Academic Publishers 141/2(1990-08-01), 317-326 0236-5731 141:2<317 1990 141 10967 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer