caa a22 4500 46574687X CHVBK 20180323111823.0 cr unu---uuuuu 170327e19900101xx s 000 0 eng 10.1007/BF00323103 doi (NATIONALLICENCE)springer-10.1007/BF00323103 The challenge of microelectronics for analytical chemistry [Elektronische Daten] Analysis for the development of VLSI devices [M. Grasserbauer, G. Stingeder] Summary: Major new tasks for Analytical Chemistry arising from the rapid development of microelectronics are presented, taking as an example silicon technology for the production of highly integrated memory devices. Referring to the various steps of production of such devices in MOS-technology, important analytical problems and their treatment are discussed. It will be shown that surface and interface analysis techniques have a particular significance. Springer-Verlag, 1990 Grasserbauer M. Insititute for Analytical Chemistry, Laboratory for Physical Analysis, Technical University Vienna, Getreidemarkt 9, A-1060, Wien, Austria aut Stingeder G. Insititute for Analytical Chemistry, Laboratory for Physical Analysis, Technical University Vienna, Getreidemarkt 9, A-1060, Wien, Austria aut Fresenius' Journal of Analytical Chemistry Springer-Verlag 337/6(1990-01-01), 701-714 0937-0633 337:6<701 1990 337 216 https://doi.org/10.1007/BF00323103 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF00323103 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Grasserbauer M. Insititute for Analytical Chemistry, Laboratory for Physical Analysis, Technical University Vienna, Getreidemarkt 9, A-1060, Wien, Austria aut NATIONALLICENCE 700 1- Stingeder G. Insititute for Analytical Chemistry, Laboratory for Physical Analysis, Technical University Vienna, Getreidemarkt 9, A-1060, Wien, Austria aut NATIONALLICENCE 773 0- Fresenius' Journal of Analytical Chemistry Springer-Verlag 337/6(1990-01-01), 701-714 0937-0633 337:6<701 1990 337 216 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer