caa a22 4500 465746926 CHVBK 20180323111823.0 cr unu---uuuuu 170327e19900101xx s 000 0 eng 10.1007/BF00323094 doi (NATIONALLICENCE)springer-10.1007/BF00323094 Interface and thin film analysis: Comparison of methods, trends [Elektronische Daten] [H. Werner, A. Torrisi] Summary: Thin film properties are governed by a number of parameters such as: surface and interface chemical composition, microstructure and the distribution of defects, dopants and impurities. For the determination of most of these aspects sophisticated analytical methods are needed. An overview of these analytical methods is given including: -Features and modes of analytical methods; -Main characteristics, advantages and disadvantages of the established methods [e.g. ESCA (Electron Spectroscopy for Chemical Analysis), AES (Auger Electron Spectroscopy), SIMS (Secondary Ion Mass Spectrometry), RBS (Rutherford Backscattering Spectrometry), SEM (Scanning Electron Microscopy), TEM (Transmission Electron Microscopy), illustrated with typical examples]; -Presentation of relatively new methods such as XRM (X-ray Microscopy) and SCAM (Scanning Acoustic Microscopy). Some features of ESCA (chemical information, insulator analysis, non-destructive depth profiling) have been selected for a more detailed presentation, viz. to illustrate the application of ESCA to practical problems. Trends in instrumental development and analytical applications of the techniques are discussed; the need for a multi-technique approach to solve complex analytical problems is emphasized. Springer-Verlag, 1990 Werner H. Philips Research Laboratories, P.O. Box 80.000, NL-5600 JA, Eindhoven, The Netherlands aut Torrisi A. Dipartimento di Scienze Chimiche, Universita di Catania, Viale A. Doria 6, I-95125, Catania, Italy aut Fresenius' Journal of Analytical Chemistry Springer-Verlag 337/6(1990-01-01), 594-613 0937-0633 337:6<594 1990 337 216 https://doi.org/10.1007/BF00323094 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF00323094 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Werner H. Philips Research Laboratories, P.O. Box 80.000, NL-5600 JA, Eindhoven, The Netherlands aut NATIONALLICENCE 700 1- Torrisi A. Dipartimento di Scienze Chimiche, Universita di Catania, Viale A. Doria 6, I-95125, Catania, Italy aut NATIONALLICENCE 773 0- Fresenius' Journal of Analytical Chemistry Springer-Verlag 337/6(1990-01-01), 594-613 0937-0633 337:6<594 1990 337 216 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer