caa a22 4500 465788599 CHVBK 20180323112016.0 cr unu---uuuuu 170327e19900201xx s 000 0 eng 10.1007/BF00338501 doi (NATIONALLICENCE)springer-10.1007/BF00338501 Influences of the substrate temperature on the films plasma-polymerized at the low system pressure [Elektronische Daten] [Junichi Ohkubo, Norihiro Inagaki] Summary: Influences of the substrate temperature and the system pressure on the plasma polymerization were investigated from a viewpoint of the chemical composition of the deposited polymers. Both parameters influenced the plasma polymerization of tetrafluoroethylene (TFE). The deposition at the high substrate temperature as well as at the low system pressure led to the formation of plasma polymers being poor in fluorine moieties. This result indicates that the chemical composition of the deposited plasma polymers may be determined by interactions of activated molecules with substrate surfaces. Springer-Verlag, 1990 Ohkubo Junichi Laboratory of Polymer Chemistry, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, 432, Hamamatsu, Japan aut Inagaki Norihiro Laboratory of Polymer Chemistry, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, 432, Hamamatsu, Japan aut Polymer Bulletin Springer-Verlag 23/2(1990-02-01), 199-204 0170-0839 23:2<199 1990 23 289 https://doi.org/10.1007/BF00338501 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF00338501 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ohkubo Junichi Laboratory of Polymer Chemistry, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, 432, Hamamatsu, Japan aut NATIONALLICENCE 700 1- Inagaki Norihiro Laboratory of Polymer Chemistry, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, 432, Hamamatsu, Japan aut NATIONALLICENCE 773 0- Polymer Bulletin Springer-Verlag 23/2(1990-02-01), 199-204 0170-0839 23:2<199 1990 23 289 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer