caa a22 4500 467884285 CHVBK 20180406152729.0 cr unu---uuuuu 170328e20061101xx s 000 0 eng 10.1007/s10948-006-0127-1 doi (NATIONALLICENCE)springer-10.1007/s10948-006-0127-1 Characterization of Superconductor Coplanar Resonators Deposited on Different Substrates by Thermal Coevaporation [Elektronische Daten] [D. Seron, H. Kokabi, G. Alquié, Y. Roelens, N. Bourzgui, J. Carru] This study is based on two commercially available YBCO thin films deposited by the thermal coevaporation method on different substrates (MgO and LaAlO3). Those films should be optimized for microwave applications. The structure and microstructure of the film deposited on LaAlO3 have been investigated, respectively by XRD and SEM. These characterizations showed the high quality of the films concerning the c-axis orientation and the smooth and homogenous morphology. The films have then been etched into two different coplanar line resonators by ionic method (YBCO/LaAlO3) and chemical one (YBCO/MgO) and their microwave properties have been characterized in two different cryogenic experimental set-ups. Despite the differences between these coplanar resonators, we have obtained the same intrinsic parameters (λ0 = 190 nm, T c=87 K with γ = 3) corresponding to the data provided by THEVA and a very low surface resistance (R s=0.4 m Ω at 31 K and 10 GHz). Springer Science + Business Media, Inc., 2006 Seron D. Laboratoire des Instruments et Systèmes d'Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France aut Kokabi H. Laboratoire des Instruments et Systèmes d'Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France aut Alquié G. Laboratoire des Instruments et Systèmes d'Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France aut Roelens Y. Institut d'Electronique de Microélectronique et de Nanotechnologie (IEMN), UMR 8520, Université de Lille 1, Avenue Poincaré BP, 69-59652, Villeneuve d'Ascq, France aut Bourzgui N. Institut d'Electronique de Microélectronique et de Nanotechnologie (IEMN), UMR 8520, Université de Lille 1, Avenue Poincaré BP, 69-59652, Villeneuve d'Ascq, France aut Carru J. Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), Université du Littoral-Côte d'Opale, 50 rue F. Buisson, BP, 717-62228, Calais, Cédex, France aut Journal of Superconductivity and Novel Magnetism Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 19/7-8(2006-11-01), 661-667 1557-1939 19:7-8<661 2006 19 10948 https://doi.org/10.1007/s10948-006-0127-1 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10948-006-0127-1 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Seron D. Laboratoire des Instruments et Systèmes d'Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France aut NATIONALLICENCE 700 1- Kokabi H. Laboratoire des Instruments et Systèmes d'Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France aut NATIONALLICENCE 700 1- Alquié G. Laboratoire des Instruments et Systèmes d'Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France aut NATIONALLICENCE 700 1- Roelens Y. Institut d'Electronique de Microélectronique et de Nanotechnologie (IEMN), UMR 8520, Université de Lille 1, Avenue Poincaré BP, 69-59652, Villeneuve d'Ascq, France aut NATIONALLICENCE 700 1- Bourzgui N. Institut d'Electronique de Microélectronique et de Nanotechnologie (IEMN), UMR 8520, Université de Lille 1, Avenue Poincaré BP, 69-59652, Villeneuve d'Ascq, France aut NATIONALLICENCE 700 1- Carru J. Laboratoire d'Etude des Matériaux et des Composants pour l'Electronique (LEMCEL), Université du Littoral-Côte d'Opale, 50 rue F. Buisson, BP, 717-62228, Calais, Cédex, France aut NATIONALLICENCE 773 0- Journal of Superconductivity and Novel Magnetism Kluwer Academic Publishers-Plenum Publishers; http://www.springer-ny.com 19/7-8(2006-11-01), 661-667 1557-1939 19:7-8<661 2006 19 10948 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer