caa a22 4500 467921709 CHVBK 20180406152918.0 cr unu---uuuuu 170328e20060401xx s 000 0 eng 10.1007/s10836-005-6132-7 doi (NATIONALLICENCE)springer-10.1007/s10836-005-6132-7 Electro-thermal Stimuli for MEMS Testing in FSBM Technology [Elektronische Daten] [N. Dumas, F. Azaïs, L. Latorre, P. Nouet] The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices. Springer Science + Business Media, LLC, 2006 MEMS nationallicence bulk micromachining nationallicence defects nationallicence testing nationallicence electro-thermal stimuli nationallicence Dumas N. LIRMM, University of Montpellier/CNRS, Montpellier, France aut Azaïs F. LIRMM, University of Montpellier/CNRS, Montpellier, France aut Latorre L. LIRMM, University of Montpellier/CNRS, Montpellier, France aut Nouet P. LIRMM, University of Montpellier/CNRS, Montpellier, France aut Journal of Electronic Testing Kluwer Academic Publishers 22/2(2006-04-01), 189-198 0923-8174 22:2<189 2006 22 10836 https://doi.org/10.1007/s10836-005-6132-7 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10836-005-6132-7 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Dumas N. LIRMM, University of Montpellier/CNRS, Montpellier, France aut NATIONALLICENCE 700 1- Azaïs F. LIRMM, University of Montpellier/CNRS, Montpellier, France aut NATIONALLICENCE 700 1- Latorre L. LIRMM, University of Montpellier/CNRS, Montpellier, France aut NATIONALLICENCE 700 1- Nouet P. LIRMM, University of Montpellier/CNRS, Montpellier, France aut NATIONALLICENCE 773 0- Journal of Electronic Testing Kluwer Academic Publishers 22/2(2006-04-01), 189-198 0923-8174 22:2<189 2006 22 10836 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer