caa a22 4500 467922926 CHVBK 20180406152922.0 cr unu---uuuuu 170328e20060101xx s 000 0 eng 10.1134/S1087659606010032 doi (NATIONALLICENCE)springer-10.1134/S1087659606010032 Investigation into doping of silica glasses with fluorine by modified chemical vapor deposition [Elektronische Daten] [A. Andreev, K. Dukel'skii, V. Ermakov, M. Eron'yan, I. Kryukov, G. Petrovskii, M. Serkov, M. Tsibinogina] The equilibrium observed during modified chemical vapor deposition (MCVD) of silica glasses doped with fluorine is investigated by chemical thermodynamics. The influence of the flow rate of Freon-12 and sulfur hexafluoride on the efficiency of the incorporation of fluorine into the condensed phase is analyzed. It is revealed that, at very low flow rates of fluorinating reactants, more than 50% of fluorine can be incorporated into the glass. The refractive index and the efficiency of the conversion of SiCl4 into the fluorine-doped silica glass are studied as functions of the vapor-gas phase composition. Pleiades Publishing, Inc., 2006 Andreev A. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut Dukel'skii K. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut Ermakov V. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut Eron'yan M. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut Kryukov I. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut Petrovskii G. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut Serkov M. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut Tsibinogina M. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut Glass Physics and Chemistry Nauka/Interperiodica 32/1(2006-01-01), 33-37 1087-6596 32:1<33 2006 32 10720 https://doi.org/10.1134/S1087659606010032 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S1087659606010032 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Andreev A. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut NATIONALLICENCE 700 1- Dukel'skii K. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Ermakov V. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut NATIONALLICENCE 700 1- Eron'yan M. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Kryukov I. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut NATIONALLICENCE 700 1- Petrovskii G. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Serkov M. "Vavilov State Optical Institute”, State Scientific Center, Federal State Unitary Enterprise, Birzhevaya liniya 12, 190034, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Tsibinogina M. OAO PNPPK, ul. Dvadtsatipyatiletiya Oktyabrya 106, GSP-590, 614990, Perm, Russia aut NATIONALLICENCE 773 0- Glass Physics and Chemistry Nauka/Interperiodica 32/1(2006-01-01), 33-37 1087-6596 32:1<33 2006 32 10720 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer