caa a22 4500 467923434 CHVBK 20180406152923.0 cr unu---uuuuu 170328e20060701xx s 000 0 eng 10.1134/S1087659606040109 doi (NATIONALLICENCE)springer-10.1134/S1087659606040109 Investigation of the physicochemical properties, structure, and composition of nanosized borosilicate films prepared by the sol-gel method [Elektronische Daten] [I. Smirnova, O. Shilova, V. Moshnikov, M. Panov, V. Shevchenko, N. Klimenko] This paper reports on the results of investigations into the specific features of the deposition of hybrid organic-inorganic borosilicate films prepared by the sol-gel method for the use in the planar technology of microelectronics. In order to modify the properties of the borosilicate films, a number of water-soluble hydroxyl-containing oligomers (with different molecular topologies and different molecular weights from 300 to 5100 g/mol) are introduced into the sol-gel system. The effect of these polyols on the sol viscosity, the thickness, and the surface morphology of the synthesized films is revealed by viscometry, ellipsometry, optical microscopy, atomic-force microscopy, and thermal analysis. These films are designed for the use as sources for boron diffusion into silicon in order to fabricate heavily doped diffusion layers with a dopant concentration of (5-7) × 1020 cm−3. The depth of occurrence of diffusion layers is approximately equal to 4 μm. Pleiades Publishing, Inc., 2006 Smirnova I. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, ul. Odoevskogo 24/2, 199155, St. Petersburg, Russia aut Shilova O. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, ul. Odoevskogo 24/2, 199155, St. Petersburg, Russia aut Moshnikov V. St. Petersburg State University of Electrical Engineering, ul. Professora Popova 5, 197376, St. Petersburg, Russia aut Panov M. St. Petersburg State University of Electrical Engineering, ul. Professora Popova 5, 197376, St. Petersburg, Russia aut Shevchenko V. Institute of Chemistry of Macromolecular Compounds, National Academy of Sciences of Ukraine, Khar'kovskoe sh. 48, 02160, Kiev, Ukraine aut Klimenko N. Institute of Chemistry of Macromolecular Compounds, National Academy of Sciences of Ukraine, Khar'kovskoe sh. 48, 02160, Kiev, Ukraine aut Glass Physics and Chemistry Nauka/Interperiodica 32/4(2006-07-01), 460-470 1087-6596 32:4<460 2006 32 10720 https://doi.org/10.1134/S1087659606040109 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S1087659606040109 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Smirnova I. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, ul. Odoevskogo 24/2, 199155, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Shilova O. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, ul. Odoevskogo 24/2, 199155, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Moshnikov V. St. Petersburg State University of Electrical Engineering, ul. Professora Popova 5, 197376, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Panov M. St. Petersburg State University of Electrical Engineering, ul. Professora Popova 5, 197376, St. Petersburg, Russia aut NATIONALLICENCE 700 1- Shevchenko V. Institute of Chemistry of Macromolecular Compounds, National Academy of Sciences of Ukraine, Khar'kovskoe sh. 48, 02160, Kiev, Ukraine aut NATIONALLICENCE 700 1- Klimenko N. Institute of Chemistry of Macromolecular Compounds, National Academy of Sciences of Ukraine, Khar'kovskoe sh. 48, 02160, Kiev, Ukraine aut NATIONALLICENCE 773 0- Glass Physics and Chemistry Nauka/Interperiodica 32/4(2006-07-01), 460-470 1087-6596 32:4<460 2006 32 10720 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer