caa a22 4500 46792595X CHVBK 20180406152929.0 cr unu---uuuuu 170328e20060901xx s 000 0 eng 10.1134/S0020168506090172 doi (NATIONALLICENCE)springer-10.1134/S0020168506090172 Preparation of trichlorosilane by plasma hydrogenation of silicon tetrachloride [Elektronische Daten] [A. Gusev, R. Kornev, A. Sukhanov] We have studied silicon tetrachloride hydrogenation in an rf (40.68 MHz) plasma and have determined the trichlorosilane yield as a function of the molar energy input, H2: SiCl4 molar ratio, and pressure. The highest trichlorosilane yield achieved is 60%, and the minimum energy input is 0.3 kW h per mole of SiHCl3. Pleiades Publishing, Inc., 2006 Gusev A. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Kornev R. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Sukhanov A. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Inorganic Materials Nauka/Interperiodica 42/9(2006-09-01), 1023-1026 0020-1685 42:9<1023 2006 42 10789 https://doi.org/10.1134/S0020168506090172 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S0020168506090172 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Gusev A. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Kornev R. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Sukhanov A. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 773 0- Inorganic Materials Nauka/Interperiodica 42/9(2006-09-01), 1023-1026 0020-1685 42:9<1023 2006 42 10789 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer