caa a22 4500 467926441 CHVBK 20180406152931.0 cr unu---uuuuu 170328e20061201xx s 000 0 eng 10.1134/S0020168506120041 doi (NATIONALLICENCE)springer-10.1134/S0020168506120041 Temperature effect on the structure of ZnSe layers grown by chemical vapor deposition [Elektronische Daten] [E. Gavrishchuk, V. Ikonnikov, L. Kuznetsov, S. Mazavin] The heat exchange between the substrate, growing layer, and gas flow in a CVD reactor is analyzed theoretically. The results indicate that the temperature of the gas mixture in the reactor influences the surface temperature of the polycrystalline zinc selenide deposit. Experimental data are presented on the variation of the average grain size across the ZnSe deposit. The thermal conditions of CVD and secondary crystallization during long-term deposition are shown to have a significant effect on the depth distribution of the grain size. Pleiades Publishing, Inc., 2006 Gavrishchuk E. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Ikonnikov V. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Kuznetsov L. Nizhni Novgorod State Technical University, ul. Minina 24, 603600, Nizhni Novgorod, Russia aut Mazavin S. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Inorganic Materials Nauka/Interperiodica 42/12(2006-12-01), 1302-1307 0020-1685 42:12<1302 2006 42 10789 https://doi.org/10.1134/S0020168506120041 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S0020168506120041 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Gavrishchuk E. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Ikonnikov V. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Kuznetsov L. Nizhni Novgorod State Technical University, ul. Minina 24, 603600, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Mazavin S. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 773 0- Inorganic Materials Nauka/Interperiodica 42/12(2006-12-01), 1302-1307 0020-1685 42:12<1302 2006 42 10789 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer