caa a22 4500 467927340 CHVBK 20180406152933.0 cr unu---uuuuu 170328e20060801xx s 000 0 eng 10.1134/S0020168506080231 doi (NATIONALLICENCE)springer-10.1134/S0020168506080231 High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from it [Elektronische Daten] [L. Chuprov, P. Sennikov, K. Tokhadze, S. Ignatov, O. Schrems] The impurity compositions of silicon tetrafluoride and silane prepared from it have been determined by high-resolution Fourier-transform IR spectroscopy. In the spectra of SiF4 samples differing in purity, we have identified rovibrational bands arising from Si2F6O, SiF3OH, HF, SiF3H, SiF2H2, SiH3F, CH4, CO2, and CO impurities. Their detection limits lie in the range 9 × 10−5 (CO2) to 3 × 10−3 mol % (Si2F6O). In the spectra of SiH4 samples of different purity, we have detected CH4, CO2, SiF3H, SiF2H2, and SiF4 impurities. Their detection limits lie in the range 8 × 10−5 (CO2) to 1 × 10−3 mol % (SiF4). Pleiades Publishing, Inc., 2006 Chuprov L. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Sennikov P. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut Tokhadze K. Institute of Physics (Petrodvorets Branch), St. Petersburg State University, ul. Ulyanovskaya 1, 198504, Petrodvorets, Russia aut Ignatov S. Lobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, Russia aut Schrems O. Alfred Wegener Institute Foundation for Polar and Marine Research, 27570, Bremerhaven, Germany aut Inorganic Materials Nauka/Interperiodica 42/8(2006-08-01), 924-931 0020-1685 42:8<924 2006 42 10789 https://doi.org/10.1134/S0020168506080231 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S0020168506080231 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Chuprov L. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Sennikov P. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, ul. Tropinina 49, 603950, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Tokhadze K. Institute of Physics (Petrodvorets Branch), St. Petersburg State University, ul. Ulyanovskaya 1, 198504, Petrodvorets, Russia aut NATIONALLICENCE 700 1- Ignatov S. Lobachevski State University, pr. Gagarina 23, 603600, Nizhni Novgorod, Russia aut NATIONALLICENCE 700 1- Schrems O. Alfred Wegener Institute Foundation for Polar and Marine Research, 27570, Bremerhaven, Germany aut NATIONALLICENCE 773 0- Inorganic Materials Nauka/Interperiodica 42/8(2006-08-01), 924-931 0020-1685 42:8<924 2006 42 10789 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer