caa a22 4500 467927618 CHVBK 20180406152934.0 cr unu---uuuuu 170328e20060201xx s 000 0 eng 10.1134/S0020168506020087 doi (NATIONALLICENCE)springer-10.1134/S0020168506020087 Silicide formation during heat treatment of thin Ni-Pt and Ni-Pd solid-solution films and Pt/Ni bilayers on (111)Si [Elektronische Daten] [V. Ievlev, E. Shvedov, S. Soldatenko, S. Kushchev, Yu. Gorozhankin] It is shown that isothermal heat treatment of (Ni-Pt)/Si and Pt/Ni/Si heterostructures leads to the formation of oriented Ni-and Pt-based silicide solid solutions. Owing to the three equivalent azimuth orientations in the basic lattice orientation relationship for the Si-Ni1−x PtxSi system, the resulting silicides have a nanocrystalline substructure. The stability of the substructure is due to the optimal interfacial lattice match and near-special grain-boundary misorientations. The silicide phases Ni1−x PtxSi and Pt1−y NiySi (or Ni1−x PdxSi and Pd1−y NiySi) may undergo segregation, having the same lattice orientation. In both systems, the segregation is associated with the predominant Ni diffusion. The second component (Pt) is shown to stabilize the orthorhombic Ni-based silicide and to prevent NiSi2 formation. Photon processing accelerates diffusion and leads to the formation of phase-pure Ni1−x PtxSi solid solutions. Pleiades Publishing, Inc., 2006 Ievlev V. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut Shvedov E. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut Soldatenko S. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut Kushchev S. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut Gorozhankin Yu Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut Inorganic Materials Nauka/Interperiodica 42/2(2006-02-01), 151-159 0020-1685 42:2<151 2006 42 10789 https://doi.org/10.1134/S0020168506020087 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1134/S0020168506020087 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ievlev V. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut NATIONALLICENCE 700 1- Shvedov E. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut NATIONALLICENCE 700 1- Soldatenko S. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut NATIONALLICENCE 700 1- Kushchev S. Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut NATIONALLICENCE 700 1- Gorozhankin Yu Voronezh State Technical University, Moskovskii pr. 14, 394026, Voronezh, Russia aut NATIONALLICENCE 773 0- Inorganic Materials Nauka/Interperiodica 42/2(2006-02-01), 151-159 0020-1685 42:2<151 2006 42 10789 Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer