caa a22 4500 467946191 CHVBK 20180322200725.0 cr unu---uuuuu 170328e19861101xx s 000 0 eng 10.1007/BF02431647 doi (NATIONALLICENCE)springer-10.1007/BF02431647 (NATIONALLICENCE)springer-10.1007/BF00553464 Amorphous phase formation and stability in W-Ti-Si metallization materials [Elektronische Daten] [R. Ball, W. Freeman, A. Taylor, A. Todd] The range of composition over which co-sputtered alloys in the W-Ti-Si system are deposited in the amorphous state has been determined. Alloys are found to be crystalline only if they contain less than ∼ 10% Si and this is associated with the presence of terminal solid solutions in the respective binary phase diagrams. The stability of W-Si amorphous alloys was examined using differential scanning calorimetry and X-ray diffraction. The most stable glasses exist in the range 10 to 30% Si and about the WSi2 composition. There is some correlation between increasing stability and increasing activation energy for crystallization. Chapman and Hall Ltd., 1986 Ball R. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut Freeman W. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut Taylor A. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut Todd A. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut Journal of Materials Science Kluwer Academic Publishers 21/11(1986-11-01), 4029-4034 0022-2461 21:11<4029 1986 21 10853 https://doi.org/10.1007/BF02431647 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/BF02431647 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ball R. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut NATIONALLICENCE 700 1- Freeman W. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut NATIONALLICENCE 700 1- Taylor A. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut NATIONALLICENCE 700 1- Todd A. Hirst Research Centre, GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, UK aut NATIONALLICENCE 773 0- Journal of Materials Science Kluwer Academic Publishers 21/11(1986-11-01), 4029-4034 0022-2461 21:11<4029 1986 21 10853 NATIONALLICENCE 856 40 https://doi.org/10.1007/BF00553464 text/html Onlinezugriff via DOI Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE NATIONALLICENCE NL-springer