caa a22 4500 467948097 CHVBK 20180405193739.0 cr unu---uuuuu 170328e20050101xx s 000 0 eng 10.1007/s10789-005-0064-6 doi (NATIONALLICENCE)springer-10.1007/s10789-005-0064-6 (NATIONALLICENCE)springer-10.1007/PL00021878 Mechanism of copper chemical vapor deposition from copper dipivaloylmethanate in hydrogen [Elektronische Daten] [V. Bakovets, T. Levashova, I. Dolgovesova, E. Maksimovskii] The kinetics and mechanism of catalyzed copper deposition via hydrogen reduction of copper(II) dipivaloylmethanate are studied between 200 and 350°C. A multistep mechanism is proposed which involves the formation of a polychelate on the surface of the growing Cu film. Film growth is accompanied by the transfer of the organic ligand of the polychelate to the adsorbed products of Cu(dpm)2 dissociation. The low activation energy of the process is interpreted in terms of formal kinetics. The introduction of H(dpm) further reduces the activation energy of the process, to 10±5 kJ/mol, owing to the dissociative adsorption of the diketone. MAIK "Nauka/Interperiodica”, 2005 Bakovets V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut Levashova T. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut Dolgovesova I. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut Maksimovskii E. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut Inorganic Materials Nauka/Interperiodica 41/1(2005-01-01), 19-23 0020-1685 41:1<19 2005 41 10789 https://doi.org/10.1007/s10789-005-0064-6 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/s10789-005-0064-6 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Bakovets V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Levashova T. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Dolgovesova I. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut NATIONALLICENCE 700 1- Maksimovskii E. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, pr. Akademika Lavrent'eva 3, 630090, Novosibirsk, Russia aut NATIONALLICENCE 773 0- Inorganic Materials Nauka/Interperiodica 41/1(2005-01-01), 19-23 0020-1685 41:1<19 2005 41 10789 NATIONALLICENCE 856 40 https://doi.org/10.1007/PL00021878 text/html Onlinezugriff via DOI Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE NATIONALLICENCE NL-springer