caa a22 4500 467951861 CHVBK 20180405193743.0 cr unu---uuuuu 170328e20050101xx s 000 0 eng 10.1007/PL00021881 doi (NATIONALLICENCE)springer-10.1007/PL00021881 (NATIONALLICENCE)springer-10.1007/s10789-005-0073-5 Structure and properties of metal nitride films produced by ion implantation [Elektronische Daten] [P. Ignatenko, N. Klyakhina, M. Badekin] Nitride films are grown on Ti, Ta, Mo, W, Ni, Si(111), and NaCl(100) substrates by ion implantation, and their phase composition, structure, and properties are studied. The films produced using a titanium target are multiphase and contain, in addition to TiN and Ti2N (and minor amounts of nitrides of the substrate metal), TiO2 and oxides of the substrate metal in the form of islands 0.04 to 0.2μm in size, distributed at random over the film. The presence of several phases in the films determines their mechanical and electrical properties and ensures good adhesion and corrosion resistance. MAIK "Nauka/Interperiodica”, 2005 Ignatenko P. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine aut Klyakhina N. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine aut Badekin M. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine aut Inorganic Materials Nauka/Interperiodica 41/1(2005-01-01), 36-41 0020-1685 41:1<36 2005 41 10789 https://doi.org/10.1007/PL00021881 text/html Onlinezugriff via DOI 1 research-article jats NATIONALLICENCE 856 40 https://doi.org/10.1007/PL00021881 text/html Onlinezugriff via DOI NATIONALLICENCE 700 1- Ignatenko P. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine aut NATIONALLICENCE 700 1- Klyakhina N. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine aut NATIONALLICENCE 700 1- Badekin M. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine aut NATIONALLICENCE 773 0- Inorganic Materials Nauka/Interperiodica 41/1(2005-01-01), 36-41 0020-1685 41:1<36 2005 41 10789 NATIONALLICENCE 856 40 https://doi.org/10.1007/s10789-005-0073-5 text/html Onlinezugriff via DOI Metadata rights reserved Springer special CC-BY-NC licence nationallicence BK010053 XK010053 XK010000 NATIONALLICENCE NATIONALLICENCE NL-springer NATIONALLICENCE NATIONALLICENCE NL-springer